本論文致力於將可大面積化之自組裝陽極氧化鋁模板（Anodic Aluminum Oxide template, AAO template）應用於熱壓式奈米壓印技術以及聚二甲基矽氧烷（PDMS）鑄模技術作為有機或無機發光元件(Inorganic\Organic Light Emitting Devices)的表面處理，以提高其出光效率。當前的奈米壓印技術多以微影蝕刻製程製作出的模板來作為壓印模仁（mold），但此模仁的成本高、且無法大面積化，使用數次之後容易產生結構損毀，因此傳統的奈米壓印技術至今尚欠缺應用於元件上的實例；AAO模板的製程簡單便宜、孔洞密度等各項參數可隨意調整，遂成為微奈米技術中極具應用性的工具。PDMS為一種常見的合成塑膠，在固化前具有良好的流動性，適合翻鑄超精細結構；且表面能非常低，固化後抗酸鹼、抗有機溶劑腐蝕，亦可作為奈米壓印之模仁使用；曾有文獻提及將具有微透鏡陣列（microlens array）之PDMS薄膜貼附在OLED之出光面，作為增加取光效率之設計，因此，利用AAO模板做為奈米壓印模仁，搭配PDMS鑄模技術，可望為OLED之表面處理打開一條新路。
本研究第一部份使用市售的氧化鋁濾膜作為熱壓式奈米壓印之模仁，探討其壓印製程之穩定性、結構均勻度、有效壓印面積及模具表面抗沾黏的能力等；若配合正確的製程條件，有機會達到大面積均勻壓印。本研究進一步使用PDMS灌鑄AAO模板，期望能控制PDMS之固化條件以達到合適的深寬比而順利脫模，並測試此奈米結構之光學性質，發現有機會增加元件出光效率90%。

A new, low-cost approach for enhancing light extraction of organic or inorganic light emitting devices by texturing emitting surfaces was studied in this research. The surface is textured either by nanoimprinting or nanocasting technologies which use Anodic Aluminum Oxide templates (AAO templates) as molds. Unlike other nanoimprinting molds AAO templates have advantages in easy fabrication, controllable pore sizes and large printing area. Polydimethyl siloxane (PDMS) is one kind of common polymers as nanoimprinting materials. Fluidity and low surface energy make it easy to conform to the surface and demold. Therefore, it is suitable for casting fine structures.

中文摘要..................................................I
英文摘要.................................................II
誌謝....................................................III
目錄......................................................V


第一章 導 論
1.1 研究背景與動機.......................................1
1.1.1 有機發光二極體之效率改善.......................1
1.1.2 表面結構之製作.................................1
1.1.3 研究目的.......................................2
1.2 論文架構.............................................3

第二章 理論背景與文獻回顧
2.1 OLED 或 LED出光效率的改善............................4
2.2 奈米壓印技術介紹....................................12
2.2.1 熱壓式奈米轉印技術之介紹......................12
2.2.2 步進光感成形式奈米轉印........................15
2.2.3 可撓性奈米轉印................................16
2.2.4 奈米轉印之關鍵技術............................17
2.3 陽極氧化鋁模板......................................19
2.3.1 AAO模板的形成機制.............................19
2.3.2 AAO模板的應用.................................21
2.4 PDMS鑄模............................................23

第三章 實驗設置與步驟
3.1 壓印實驗............................................24
3.1.1 壓印設備介紹..................................24
3.1.2 壓印製程步驟..................................26
3.1.2.1 AZ1500(38cP)壓印實驗..................26
3.1.2.2 PMMA壓印實驗..........................28
3.2 PDMS鑄模實驗........................................29
3.2.1 將 PDMS 澆淋於封底之 AAO 上...................29
3.2.2 利用毛細現象讓 PDMS 滲入 AAO 孔洞中...........30
3.3 光學實驗............................................32
3.4 AAO表面處理.........................................34
3.5 AAO拋光實驗.........................................36

第四章 製程結果與討論
4.1 壓印於AZ1500(38cP)阻劑..............................37
4.1.1 壓印成果分析..................................37
4.1.2 壓力效應分析..................................40
4.2 壓印於PMMA..........................................42
4.2.1 壓印結果分析..................................42
4.2.2 厚膜PMMA壓印結果.............................48
4.2.3 壓印溫度之探討................................52
4.2.4 AAO拋光實驗...................................55
4.3 PDMS鑄模實驗........................................58
4.3.1 將AAO封底之後澆鑄............................58
4.3.2 製作PDMS奈米線...............................64
4.4 光學實驗結果分析....................................66

第五章 結論與未來展望
5.1 結論................................................68
5.2 未來展望............................................70
參考文獻.................................................71

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