本研究以SOI晶片為基礎，透過一般型態之電容式平面加速度計為例，探討加速度計元件之設計考量參數，並透過元件設計模擬、製程開發，研製出平面加速度計。並透過量測系統的建置，量測平面加速度計之基本元件特性。從此基礎進而發展新型態透過SOI晶片為基礎，研製以差分電容感測電極之出平面加速度計，其中感測電極以氣密閉合架構提高元件靈敏度，並初步驗證出平面加速度計之可行性。此出平面具有：(1)質量塊包含SOI晶片之元件層以及處理層；(2)量測之靈敏度因為氣密閉合的差分電極感測而增加；(3)透過金屬連接SOI晶片元件層以及處理層的電性；(4)感測電極間距由SOI晶片中的氧化層決定。並透過出平面加速度計之設計概念，進一步設計出單一質量塊三軸加速度計，其中三軸感測方向之電極，皆以氣密閉合差分電容感測電極架構來達成。三軸加速度計除了前述出平面加速度計之特向外，具有：(1)透過多晶矽回填技術連接SOI晶片元件層以及處理層的電性；(2)三軸感測方向皆是以氣密閉合之差分電容電極為架構，且透過單一質量塊感測三軸方向之設計。最後，製程設計具有批量製造之能力，並初步驗證三軸加速度計之可行性。

第一章 緒論 1
1-1前言 1
1-2文獻回顧 2
1-3 研究目標 8
第二章 加速度計基本原理及元件特性 28
2-1 基本原理 28
2-1-1 加速度計元件運動行為 28
2-1-2 加速度計元件電容感測表示 31
2-1-3 電容感測放大器 33
2-1-4 加速度計元件增益流程圖 35
2-2 加速度計元件特性介紹 35
2-3 平面加速度之設計 37
2-3-1 平面加速度元件設計概念 37
2-3-2 製程設計與結果 38
2-3-3 元件封裝與量測 39
2-4 結論 39
第三章 出平面差分電極之加速度計設計 48
3-1 設計概念 48
3-2 製程設計與結果 50
3-3 元件封裝與量測 52
3-4結論 53
第四章 差分感測電極之單質量塊三軸加速度計 67
4-1 設計概念 67
4-2 製程設計與結果 74
4-3 元件封裝與量測 76
4-4 結論 79
第五章 總結 96
5-1 研究成果 96
5-2 未來工作 97
參考文獻 100
論文發表 108
附錄A 微機電加速度計之衝擊試驗可靠度分析 109
A-1 衝擊試驗 109
A-2 結論 110
附錄B 業界加速度計元件發展 120

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