矽晶太陽能電池為發展最早，技術最為成熟的太陽能電池種類，即使近年來薄膜太陽能電池及染料敏化太陽能電池逐漸開始發展，但全球太陽能電池的市占率仍以矽晶太陽能電池為最大宗。而為了擴充產能，矽晶太陽能產業持續有巨額資金投入，各項新技術、新設計也一一導入量產，使得矽晶太陽能電池產品效率更高、成本更低，邁向更成熟、普及的階段。
本論文的研究目的在於發展以矽晶太陽能電池為主體的效率改善方法，將電漿浸入離子佈植法(plasma immersion ion implantation，PIII)及線型大氣電漿鍍膜技術(thin film deposition by linear atmospheric pressure plasma jet)，應用於矽晶太陽能電池的不同階段。其中依研究主題畫分，可主要分為(1)矽晶太陽能電池效率改善，(2)解決因背面磷溢鍍的LFC結構電池，(3)以線型大氣電漿成長表面鈍化膜，在論文中將詳細討論研究結果，並逐一分析其效能改善原因。
在矽晶太陽能電池效率改善研究中，發展二階段之快速氫鈍化法，其效率最高提升數值為絕對值之3%，而其效率提升原因除了氮化矽層氫鈍化以外，尚包括了銀鋁膠的再燒結現象。在LFC結構電池的效率提升研究中，以PIII移除背部磷擴散層，減少背部載子損失而提升五吋單晶電池效率約0.6%。以線型大氣電漿成長表面鈍化膜的研究中，其最佳的鈍化效果可與溼式氧化法所成長之鈍化層比較，載子生命週期可由7 us提升至48 us；在研究中同時發現鈍化層之鈍化效果將發生隨退火溫度而有所有改變，以及隨時間衰退的現象，將於後續文章中討論。

目錄
第一章　緒論
第二章　矽晶太陽能電池介紹
第三章 電漿離子佈植技術與大氣電漿源介紹
第四章　實驗設備與分析方法
第五章 矽晶太陽能電池效率改善
第六章 改善因背面磷溢鍍的LFC結構電池
第七章 以線型大氣電漿成長表面鈍化膜
第八章 研究結論
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