於微米尺度下精確操控細胞乃為生醫科技領域中備受重視之課題。本文利用微機電技術製作微米尺度之磁薄膜輸送軌道，於自製式旋轉磁場平台之作用下，磁性載具始能沿順軌道作精準移動，本研究成功地操控載具進行：直線行進、來回往返及反平行前進等多種移動方式。其中，討論包括磁性薄膜形狀對於磁化翻轉難易度之關係，並且發現於弱磁場影響下，磁載體會出現躍遷或是斥離軌道之現象；對此，配合適當的磁微米軌道設計，載具在晶片上的二維移動定位可以更加準確。應用上，吞入磁珠之細胞搭乘此磁性載體後，於旋轉外磁場之影響下，可以順利將此細胞輸送至特定位置，已進行後續的生醫檢測。本文提出運輸活體細胞的新型操控方式，期盼研究成果將助益於生醫檢測之領域。

摘要 ....................................................................................................................... I
Abstract ................................................................................................................ II
致謝 ..................................................................................................................... III
目錄 ......................................................................................................................V
圖目錄...............................................................................................................VIII
第一章緒論 ...................................................................................................... 1
1-1 前言........................................................................................1
1-2 研究動機與目的....................................................................1
1-3 實驗架構................................................................................2
第二章 理論基礎與文獻回顧 ..................................................................... 5
2-1 鐵磁性...................................................................................5
2-2 磁區結構...............................................................................6
2-2-1 磁區的成因.................................................................6
2-2-2 單磁區.........................................................................9
2-2-3 可逆磁區磁化轉動...................................................10
2-2-4 不可逆磁區磁化轉動...............................................11
2-3 磁性薄膜量測技術.............................................................13
VI
2-3-1 磁電阻效應...............................................................13
2-3-2 原子力顯微鏡技術...................................................15
2-4 生醫磁操控技術.................................................................16
2-4-1 利用電流建立磁場梯度...........................................16
2-4-2 以負介電泳力降低表面與磁性物質接觸的影響...17
2-4-3 磁性微米結構建立磁場梯度...................................18
2-4-4 外加磁場直接操控微結構.......................................19
2-4-5 生醫磁操控晶片.......................................................20
第三章 研究方法........................................................................................... 31
3-1 磁性結構製作.....................................................................31
3-1-1 光罩圖樣設計...........................................................31
3-1-2 光罩製作...................................................................32
3-1-3 晶片清洗...................................................................33
3-1-4 黃光微影與電子束蒸鍍...........................................34
3-1-5 磁性載具水溶液製作...............................................35
3-2磁操控設備架設..................................................................36
3-2-1 觀測平台...................................................................36
3-2-3 電荷耦合元件...........................................................37
3-3 異向性磁阻量測.................................................................37
VII
3-3-1 量測樣品製作...........................................................38
3-3-2 磁阻量測系統...........................................................38
3-4 MFM磁軌道表面量測........................................................38
第四章 實驗結果........................................................................................... 42
4-1 異向性磁阻曲線圖.............................................................42
4-2 不同磁場下MFM影像分析圖..........................................43
4-3 載具操控實驗步驟.............................................................46
4-4 磁載具操控結果.................................................................47
4-4-1 磁載具直行...............................................................48
4-4-2 磁載具往返移動.......................................................51
4-4-3 磁載具反向行進.......................................................52
4-4-4 磁載具改道...............................................................53
4-4-5 弱磁場下磁載具操控...............................................53
4-5 磁載具乘載細胞之移動定位.............................................54
第五章 結論與未來展望............................................................................. 73

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