目前的氣體感測器可由感測機制分成各種不同的類型，離子化氣體感測器運用各種氣體對應不同的崩潰電場作為感測機制。此篇論文呈現了一個成功操作的離子化氣體感測器，此感測元件以鎳金屬作電極材料，並設計了3-30um不同間距的電極，並用微機電製程使其微形晶片化。我們量測了各種氣體在一大氣壓下不同間距的崩潰電壓如：氦氣、氬氣、空氣、二氧化碳及氧氣。此感測器表現了高敏感度、高選擇度且不受環境溫度、溼度及氣體流動的影響。實驗數據呈現的趨勢與 Paschen’s curve十分吻合。

Gas sensor operate by a variety of fundamentally various mechanism. Ionization gas sensor operate by fingerprinting the electrical breakdown characteristics of distinct gases. This work presents the successful operation of an ionization gas sensor with gap spacing of 3-30 um and using nickel as electrodes material. The device is chip based and fabricated using micro-electro-mechanical system. We report the breakdown voltage of Helium, Argon, air, Carbon dioxide, Nitrogen and Oxygen of 3-30 um gap spacing in 760 torr. The sensor show good sensitivity and selectivity, and unaffected by temperature, humidity, and gas flow. The experimental data show alike tendency of Paschen’s curve.

第一章 緒論 1
1-1 研究動機 1
1-2 微機電技術簡介 4
1-2-1 面型微加工技術 4
1-2-1 互補式金氧半導體微機電系統(CMOS-MEMS) 5
1-3 文獻回顧 8
第二章 感測器之原理與設計 15
2-1 感測器之原理與設計 15
2-1-1 氣體放電概論 15
2-1-2 均勻電場下之崩潰電壓推導 19
2-1-3 感測器之運作機制 25
2-1-4 感測電極的設計 27
2-2 電路設計與原理 37
2-2-1 整體感測電路原理與架構 37
2-2-2 電路模擬結果與佈局 45
第三章 奈米碳管於氣體感測器之應用 47
3-1 奈米碳管簡介 47
3-2 電泳法沉積奈米碳管 48
3-2-1 電泳沉積簡介 48
3-2-2 電泳沉積原理 49
3-2-3 奈米碳管的純化、裁切與過濾 51
3-2-4 電泳法沉積流程 53
第四章 量測結果 54
4-1 鎳電極部份 54
4-2 TSMC 2P4M 0.35um製程晶片電極量測結果 62
4-3 電路量測結果 64
4-4 電泳法沉積結果 67
第五章 結論 70
5-1 研究成果與討論 70
5-2 未來工作 72
參考文獻 73

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