摘要
本研究使用電漿輔助化學氣相沉積法(plasma-enhanced chemical vapor deposition，PECVD)，混合有機單體六甲基矽氧烷(Hexamethyldisiloxane，HMDSO)、氮氣及氧氣作為反應氣體在polyethyleneterephthalate (PET)上置備氧化矽阻障層(diffusion barrier)。探討單體流量、氣體流量、腔體壓力及偏壓大小，對二氧化矽/PET的複合膜水氣穿透率(water vapor transmission rate，WVTR)的影響。並利用傅氏轉換紅外線光譜儀(FT-IR)、化學分析電子儀(ESCA)、接觸角量測系統、橢圓偏光儀(ellipsometer)、掃描式電子顯微鏡(SEM)、紫外光-可見光光譜儀(UV-Vis)及原子力顯微鏡(AFM)分析膜材之物理及化學性質。最後討論化學結構及表面形貌與水氣穿透率關聯性。

目錄
第一章 簡介....................................1
1.1 研究動機...................................1
1.2 OLED簡介...................................3
1.3 OLED封裝技術...............................4
1.3.1 封蓋(ecapsulation)技術...................4
1.3.2 薄膜保護層(thin film barrier)技術........5
1.4 微波電漿源的優點...........................8
1.5 微波電漿源的瓶頸...........................9
1.6 微波激發同軸慢波結構線型表面波系統.........11
1.7 研究內容...................................13
第二章 研究方法與儀器原理......................15
2.1 電漿處理實驗設備...........................15
2.2 氧化矽膜材材料分析儀器.....................22
2.2.1 掃描式電子顯微鏡.........................22
2.2.2 化學分析電子儀...........................23
2.2.3 橢圓偏光儀...............................24
2.2.4 原子力顯微鏡.............................24
2.2.5 傅氏轉換紅外線光譜儀.....................25
2.2.6 接觸角量測系統與表面能分析...............25
2.2.7 紫外光-可見光光譜儀......................28
2.2.8 透水氣測試儀.............................29
2.3 實驗流程...................................30
第三章 數據分析與討論..........................33
3.1 HMDSO流量之影響............................34
3.2 O2/HMDSO流量比之影響.......................43
3.3 不同偏壓之影響.............................55
第四章 結論....................................61
4.1 實驗結論...................................61
4.2 建議事項...................................62
參考文獻.......................................63

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