利用鈦金屬奈米層輔助氧氣電漿蝕刻製作出鑽石奈米柱，此簡單的方法在本研究已成功發展。研究結果顯示，利用氧氣電漿在100W下，對多晶鑽石膜表面進行蝕刻12 小時，形成的鑽石奈米柱，其平均直徑大約在100-120 nm、長度約為4 um，而經由硫酸(含10 % 過氧化氫)清洗表面的殘餘氧化物，其直徑略縮減了10-20 nm，使其為奈米級柱狀結構。而經由TEM分析證實，鑽石奈米柱為晶向[011]的單晶結構，此有利於奈米元件的製造。最後提出一模型解釋鑽石奈米柱的形成原因，發現由於鑽石膜上的鈦金屬奈米層在蝕刻初期會形成球狀物二氧化鈦氧化物，成為天然的奈米光罩，經長時間的蝕刻後本研究的鑽石奈米柱製作完成。

A simple method has been developed to fabricate diamond nanorods by oxyen plasma etching assisted with a nanoscale titanium metal layer. Vertically oriented diamond nanorods were fabricated for 12 hours on polycrystalline diamond substrate by plasma etching at 100W. The average diameter is about 100-120 nm and average length is about 4 um for diamond nanorods. After cleaning residual oxide on diamond nanorods surface using H2SO4, the average diameter reduce to about 10-20 nm. And they would be nano-scale rods structure. Diamond nanorods are single crystal looking from zone axis [011], confirmed by TEM analysis. A modal is proposed to explain how the diamond nanorods are formed. TiO2 nanoparticles are first formed onto diamond film in etching process, And TiO2 acts as nano masks subsequent for oxygen plasma etching. After etching diamond film for a long time, diamond nanorods were successfully formed.

中文摘要………………………………………………………………………………………..I
Abstract II
圖表目錄 VI
第一章 緒論 1
1-1研究動機 1
1-2 論文架構 2
第二章 文獻回顧 3
2-1常見的一維奈米結構之材料的製程與研究 3
2-1.1奈米碳管（carbon nanotube） 3
2-1.2 矽（Silicon）奈米線 4
2-1.3 氧化鋅（Zinc Oxide）奈米線 4
2-1.4 氮化鎵（Gallium Nitride）奈米線 5
2-2 鑽石的性質及應用 5
2-2.1 鑽石的結構 5
2-2.2 鑽石的特性 6
2-2.3 鑽石的應用 6
2-3 一維奈米結構的鑽石之相關研究 7
2-3.1反應性離子蝕刻(RIE) 7
2-3.2電漿輔助式化學氣相沉積(PECVD) 8
2-3.3一維奈米結構的鑽石之場發性質 9
2-4 利用鑽石製作一維結構的蕭基二極體元件 9
2-4.1 與鑽石形成歐姆接觸(Ohmic contact)的金屬 9
2-4.2 與鑽石形成蕭基接觸的金屬 10
2-4.3 一維鑽石結構蕭基二極體 [51] 10
第三章 實驗系統與分析技術簡介 19
3-1 電漿蝕刻實驗設備 19
3-1.1 氣體供應系統 19
3-1.2 抽氣裝置 19
3-1.3真空腔體 20
3-1.4 電源供應系統 20
3-2 金屬沉積系統 20
3-2.1 金屬蒸鍍 20
3-2.2 金屬濺鍍 21
3-3分析技術簡介 22
3-3.1 場發射掃描式電子顯微鏡(FESEM) 22
3-3.2 化學分析電子儀(electron spectroscopy for chemical analysis, ESCA) 23
3-3.3 歐傑電子能譜儀(Auger electron spectrometer, AES) 23
3-3.4 高解析度穿透式電子顯微鏡分析(high resolution transmission electron microscope, HRTEM) 24
第四章 實驗流程及原理 30
4-1 實驗原理 30
4-2 實驗流程 31
第五章 實驗結果與討論 34
5-1 鈦金屬奈米層輔助氧氣電漿蝕刻鑽石奈米柱結構之表面分析 34
5-1.1掃描式電子顯微鏡分析(SEM) 35
5-1.2 化學分析電子儀分析(ESCA) 37
5-1.3 歐傑能譜分析(Auger) 37
5-1.4 穿透式電子顯微鏡(TEM) 38
5-2 鈦金屬奈米層輔助氧氣電漿蝕刻鑽石奈米柱結構成長機制討論 39
5-2.1鑽石表面變化 SEM圖 39
5-2.2產生鑽石奈米柱理論機制圖 40
第六章 結論 50
第七章 參考文獻 52

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