Development of a Precision Linear and Rotary Stage Technique

精密線性平台及旋轉平台技術研製

陳柏宇(Po-Yu Chen) ； 王明習(Ming-Shi Wang) ； 覺文郁(Wen-Yuh Jywe)

《中國機械工程學刊》 38卷2期 (2017/04) Pp. 173-178

摘要

In recent years, semiconductor and biotechnology industries have put significant energy into changing linear processing equipment (X-Y-Z) into R2R (roll to roll) processing equipment. The R2R processing equipment can improve the manufacturing efficiency and reduce the cost of equipment. Consequently, angular positioning accuracy has become more important in precision mechanical equipment. This study presents the development of a precision linear and rotary stage technique applied on roller mold processing, composed of a precision rotary stage, a precision linear stage, a piezoelectric compensation stage, an angular encoder (resolution: 0.269 arc-sec per count), a spherical lens measurement system, and a multi-DOF (degree of freedom) laser interferometer measurement system (resolution: 10 nm per count). The system was integrated using a Matlab and dSPACE control interface with the Proportional Integral Derivative controller (PID controller). The compensated control results of the stage's rotary positioning accuracy, eccentric and wobble accuracy, and linear positioning accuracy are about ±0.4 arc-sec, ±5 μm, and ±100 nm respectively.

關鍵字

Piezoelectric stage ； angular positioning ； PID control

並列摘要

近年來半導體產業及生物科技產業皆希望將生產設備從傳統直線形式(X-Y-Z 軸)加工設備，改成捲對捲式加工設備（Roll to roll, R2R）。因R2R加工設備之生產特性，可以提升產能及減少成本，對此角度定位精度於精密加工設備中將更顯重要。本文提出了一個精密線性旋轉定位平台技術，其目的應用於捲對捲加工設備之滾筒模仁製造。此平台技術整合了一精密旋轉平台，一精密線性平台，一壓電補償平台，其量測回授系統包含一環形編碼器，一玻璃球量測系統，一多自由度雷射干涉儀。此平台使用Matlab 及 dSPACE 系統做整合，並採用PID 控制器。此平台技術之實驗後結果，角度定位精度±0.4arc-sec，偏心及偏擺誤差±5μm，線性定位精度±100nm。