The Effect of the Acetylene Gas Flow Rate and Doping with Titanium on the Mechanical and Tribological Properties of Diamond-Like Carbon

乙炔氣體的流量和鈦金屬的添加對於類鑽碳之機械與磨潤性質的影響

蘇演良(Yen-Liang Su) ； 洪政豪(Jeng-Haur Horng) ； 埃琳娜(Elena Torskaya) ； 高文顯(Wen-Hsien Kao) ； 游展青(Chang-Ching Yu)

《中國機械工程學刊》 41卷1期 (2020/02) Pp. 11-20

摘要

This study determines the mechanical and tribological properties of Diamond-Like Carbon (DLC), DLC doped titanium (DLC-Ti) and hydrogenated DLC doped titanium (DLC-CH-Ti) coatings. These coatings are deposited on a high-speed steel substrate (SKH51) using Closed Field Unbalanced Magnetron Sputtering (CFUBMS). GDS and EDX analysis shows that when acetylene flow rate is added in deposited chamber, the content of the metallic element (titanium) decreases. The surface morphology for all coatings exhibits a clustered morphology. The XPS analysis at the C1s core level shows that the C-C sp^3 ratio increases as that acetylene gas and the titanium content are added. The DLC-CH-Ti coating has the optimal mechanical and tribological properties, with a wear rate of 0.09 (10^(-6)mm^3/Nm) and a friction coefficient of 0.11as sliding against an Al_2O_3 ball. These results are much better than those for the other coatings. The wear rate is 194 times less than that for the substrate alone and the corrosion resistance of the coatings is better than that for the original substrate.

關鍵字

DLC ； Titanium ； Wear ； Corrosion

並列摘要

此論文研究了類鑽碳（DLC）、類鑽碳添加鈦金屬（DLC-Ti）和含氫類鑽碳添加鈦金屬（DLC-CH-Ti）等鍍層之機械與磨潤性質的影響。此研究使用非平衡磁控濺射法（CFUBMS）將上述鍍層濺鍍在高速鋼（SKH51）的基板上。輝光放電分光儀（GDS）的分析可以發現當加入乙炔氣體，鈦金屬的含量會降低。所有鍍層呈現出團簇的表面型態。X射線光電子光譜（XPS）分析也可以發現碳的sp^3鍵結的比例會隨著乙炔和鈦金屬的加入而增加。其中含氫類鑽碳添加鈦金屬的鍍層具有最佳的機械與磨潤性質，其磨耗率為0.09（10^(-6)mm^3/Nm），與Al_2O_3球對磨後的摩擦係數為0.11。這些結果都比其他鍍層來得佳，磨耗率甚至比原材還要低了約194倍，並且所有鍍層的耐腐蝕性也優於原材。