以電漿化學氣相沉積DLC薄膜在氮氧化處理V4E高釩工具鋼之研究

A Study on the Use of PECVD DLC Film in Oxynitriding-Treated V4E High Vanadium Tool Steel

張世賢(S.H. Chang) ； 彭昶凱(C.K. Peng) ； 劉沖明(C.M. Liu) ； 吳韋辰(W.C. Wu)

《鑛冶：中國鑛冶工程學會會刊》 61卷1期 (2017/03) Pp. 54-61

https://doi.org/10.30069/MM.201703_61(1).0005

摘要

本研究利用氮氧化處理於V4E高釩工具鋼上形成氮氧化層，且作為類鑽碳薄膜之中介層提升薄膜附著性，接著使用直流脈衝電漿化學氣相沉積法，以雙極(-15+10%)負脈衝偏壓方式，藉由改變不同的CH_4氣體流量(5、15、25及35 sccm)，沉積類鑽碳薄膜於氮氧化處理後之V4E高釩工具鋼上，接著透過拉曼分析、磨耗測試、硬度測試及腐蝕試驗等，以檢測薄膜之性質。實驗結果顯示，隨著CH_4氣體流量增加至35 sccm，使得鍍膜沉積速度增快，DLC厚度急遽地增加到4.4 μm，但反而造成附著性降低。因此，使用非平衡雙極負脈衝偏壓方式，功率密度為400 mW．cm^(-2)、沉積時間90分鐘以及CH_4氣體流量為5 sccm時，所沉積之類鑽碳薄膜具有最佳的機械性質，同時此參數的複合表面處理具有最低的磨耗體積損失量(荷重1.96 N及4.9 N之磨耗試驗中，分別為6.23×10^(-3) mm^3及1.19×10^(-2)mm^3)。另一方面，增加DLC厚度可以有效改善耐腐蝕性，當CH_4氣體流量增加為35 sccm時，在3.5 wt% NaCl溶液的腐蝕試驗中，其具有最低的腐蝕電流(1.36×10^(-4) A．cm^(-2))及最高的極化阻抗(5.64×10^2 Ω．Cm^2)。此結果證實氮氧化/類鑽碳薄膜複合表面處理之V4E高釩工具鋼具有最佳之耐磨耗性和耐腐蝕性。

關鍵字

V4E工具鋼 ； 氮氧化處理 ； 類鑽碳膜 ； 直流脈衝電漿化學氣相沉積法 ； 磨耗

並列摘要

After oxynitriding-treatment of V4E high vanadium tool steel, the diamond-like carbon (DLC) film was coated on the steel by DC-pulsed PECVD. We studied many major parameters affecting the DC-pulsed PECVD coating including the CH_4 gas flow rate (5, 15, 25 and 35 sccm) with an unbalanced bipolar-pulsed voltage (-15+10%). Raman spectroscopy analysis, wear tests, hardness tests, and corrosion resistance inspections were conducted to compare the properties of the DLC films and the oxynitriding/DLC treated V4E high vanadium tool steel. As the CH_4 gas flow rate increased to 35 sccm, the film deposition rate increased and the DLC thickness increased to 4.4 μm. When the CH_4 gas flow rate was 5 sccm and the deposition time was 90 min, the duplex coating layers had optimal properties when DLC films were treated by a unipolar negative-pulsed voltage with power intensity 400 mW．cm^(-2). It had the lowest wear volume loss (when the load of 1.96 N and 4.9 N was 6.23×10^(-3) mm3 and 1.19×10^(-2) mm^3, respectively). On the other hand, when the CH_4 gas flow rate increased to 35 sccm, it had the lowest corrosion current (Icorr = 1.36×10^(-4) A．cm^(-2)) and highest polarization resistance (Rp = 5.64×10^2 Ω．Cm^2) in 3.5 wt% NaCl solutions. The oxynitriding/DLC duplex treatment of V4E high vanadium tool steel had optimal wear and corrosion resistance.

並列關鍵字

V4E tool steel ； Oxynitriding Treatment ； DLC ； DC-pulsed PECVD ； Wear