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並列摘要


A simple, economic and efficient type of mask printer for micro-planar structure fabrications has been designed and made. Interdigital transducers and surface acoustic wave delay lines have been fabricated using this type of mask printers. Features of the delay line with two transducers each of 15 finger pairs were found excellent which include delay time 5.0 microseconds, frequency response bandwidth 4.5 MHz at center frequency 68 MHz, insertion loss 15 db and attenuation of surface acoustical wave 0.17 db/cm. The laser optical probing technique was used to measure the energy distribution profiles of surface acoustic waves.

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