Thin superconducting films of YBa2Cu3O7 have been irradiated at 293 K and 77 K with H, He and Ar ions. Independently of the mass and the energy of the incident ions, the Tc reduction below 4.2 K occurred in the region between 2 x 10^(-3) and 1.6 x 10^(-2) displacements per atom (dpa). For dpa values greater than 4 x 10^(-3) (0.2 eV/atom) a strong increase in resistance was noted; indicating a metallic to insulating transformation. The orthorhombic to tetragonal phase transformation occurred between 0.01 and 0.03 dpa, while the transformation into the amorphous phase was observed at about 0.1 dpa after He irradiation at 77 K. The damage mechanisms which are responsible for all these changes are discussed.