InTaO_4 films were prepared by alternative deposition of In_2O_3 and Ta_2O_5 layers, followed by rapid thermal annealing (RTA) in order to induce solid state diffusion. These oxide films showed a broader optical absorption than TiO_2 over the range of visible light and sufficient photocatalytic function under visible light illumination. The structure was examined using XRD and TEM. It is confirmed that stoichiometric InTaO_4 films can be produced by this hybrid approach. The optical absorption was measured by a UV-VIS-NIR spectrophotometer with wavelengths ranging from 300 to 900 nm. The visible light absorption is associated with the formation of crystalline oxide films during rapid thermal annealing. Lastly, the photocatalytic property of InTaO_4 films was gauged by the photodegradation test which measured the reduction of light absorbance affected by the decomposition of methylene blue under visible light irradiation.
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