利用掃描式沾水筆探針微影技術研製奈米級分子層薄膜結構

Nanopatterning of Functional Groups Using Dip-Pen Nanolithography

吳家豪(Chia-Hao Wu) ； 許鉦宗(Jeng-Tzong Sheu)

《科儀新知》 146期 (2005/06) Pp. 25-31

https://doi.org/10.29662/IT.200506.0003

摘要

奈米科技已然成為本世紀前期重要的主導核心技術，而在眾多先進研發技術中，掃描式探針微影術種類繁多且已成為發展奈米科技不可或缺的工具。本研究乃是利用掃描式沾水筆探針微影技術藉著空氣中水分子當媒介，直接在矽質晶片上進行奈米級分子層結構圖案的微影塗佈。在此種方式中探針就像一隻筆，而分子層溶液就如同墨水一般，除了傳統墨水圖形化之外，目前的研發技術已能將3-胺基丙烷三甲氧基矽線寬精準地控制在60-70nm之間，同時奈米金顆粒亦能選擇性沉積於該圖形上。

並列摘要

Nanopatterning using dip-pen nanolithography (DPN) has been demonstrated with MHA ink on gold substrates in a temperature-controlled and humidity-controlled environment. On the other hand, N-(2-aminoethyl)-3-amino-propyl-trimethoxysilane (AEAPTMS) is used as ink to deposite on the silicon dioxide surface as linker for charged nanoparticles. It is found that the feature size of AEAPTMS can be determined by the environment relative humidity. Patterns down to 60nm are demonstrated. Also, gold nanoparticles with 15nm in diameter are selectively deposited on the surfaces of the AEAPTMS DPN patterns.