The transmission X-ray microscope developed at NSRRC has characteristic functions of large penetration depth (>100 μm), high resolution (25-60 nm), tunable energy-range (8-11 keV), and the capability of 3D tomography. Having these functionalities, this microscope is also capable of performing image modes resemble to those of optical microscope, such as, the absorption contrast, phase contrast, and the dark field imaging. In this paper, briefs of the principles and the applications of the X-ray microscope are presented.
The transmission X-ray microscope developed at NSRRC has characteristic functions of large penetration depth (>100 μm), high resolution (25-60 nm), tunable energy-range (8-11 keV), and the capability of 3D tomography. Having these functionalities, this microscope is also capable of performing image modes resemble to those of optical microscope, such as, the absorption contrast, phase contrast, and the dark field imaging. In this paper, briefs of the principles and the applications of the X-ray microscope are presented.