快速橢偏單層膜計算模組開發

The Software Module Development of Fast Data Calculation in Ellipsometry for Single Layer Film

謝余松(Yu-Sung Hsieh) ； 盧宥任(Yu-Jen Lu) ； 張益三(Yi-San Chang)

《科儀新知》 188期 (2012/06) Pp. 40-48

https://doi.org/10.29662/IT.201206.0005

摘要

橢圓偏光術是一種特殊的薄膜特性量測技術，利用該方法可獲得待測樣品之薄膜厚度、折射率、消光係數與表面粗糙度等重要參數。本文探討將橢偏術應用於單層薄膜之膜厚計算過程所需建立的演算模型、軟體架構及使用者介面設計等項目，經以標準片測試後發現，本文使用的代數解析模型，具有運算時間短、能快速得到膜厚值且能避免多重解之優勢。

並列摘要

Ellipsometry is a special technology of thin film characteristics measurement and can help obtain several key parameters of the sample: film thickness, refractive index, extinction coefficient, surface roughness and so on. In this study, some required items of thin film thickness calculation including math algorithm, software framework and user interface design are discussed here and the results show it'll get high calculation rate of thin film thickness and avoid appearing multiple solutions using algebraic analytic model compared with standard film sample.