- 期刊
The Characterization and Fabrication of Pyroelectric Infrared Sensor and Application of Thermal Image Array
並列摘要
The pyroelectric infrared (PIR) sensor with the lead-titanate (PbTiO3) thin film has been successfully fabricated. A RF planar magnetron sputter was used to deposit PbTiO3 thin film. A perovskite thin film can be obtained. From the properties measurement we can obtain the remanent polarization Pr=20.8μc/cm^2 and coercive electric field Ec=79.365 kV/cm. The pyroelectric coefficient of 1.09×10^(-5) C/m^2 K at 50℃ was measured as a function of temperature. In addition, the fabricated PIR sensor properties is RV=600 (VW^(-1)) when chopper frequency is 0.3 Hz. D*=7.3×10^5 cm Hz(superscript 1/2) W^(-1) for a modulation frequency of 0.5 Hz. In this experiment, the 4×4 array for PIR sensor is also constructed and tested.
被引用紀錄
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黃軍皓（2008）。鈷掺雜P型氮化鎵稀磁半導體之研究〔碩士論文，國立清華大學〕。華藝線上圖書館。https://doi.org/10.6843/NTHU.2008.00435
延伸閱讀
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