- 期刊
Real-time Observation for the Formation of Microlens Arrays Fabricated Using Thermal Reflow Process
並列摘要
A real-time monitoring system for the spherical microlens formation has been demonstrated. The geometrical shape of the photoresist structure during thermal flow process could be interpreted by the recorded images. Additionally, the thermal reflow mechanism for the rectangular photoresist plate has also been proposed.
延伸閱讀
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