- 期刊
A Micro Force Sensor Using Force-balancing Feedback Control System and Optic-fiber Interferometers
並列摘要
The operation of a micro force-balancing force sensor with nN resolution is described. The system consists of a lever supported by torsion bars, a force controller, two electrostatic force actuators and two optic-fiber interferometers. The rotation of the lever is detected by the optic-fiber interferometers, and the lever returns its neutral position by using electrostatic-force feedback control system. The design of the force sensor and the minimum measurable range of the force sensor were analyzed by calculating force constants of torsion bars. A displacement of the lever with noise of 5 nm was obtained.
延伸閱讀
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