A Novel Measurement Device for SAW Chemical Sensors with FT-IR Spectro-microscopic Analytical Capability

In this paper, we propose a novel characterization technique of the surface acoustic wave (SAW) chemical sensors. It combines the technique of electronic frequency shifting measurement (phase lock lop) with the IR microscopic spectral analyzer and performs an in-situ measurement. Using this method, we could conduct ultrahigh sensitive measurement in mass change (from a few ppb to a few ppm range) of the SAW chemical sensors by cross-comparison with the electronic signals of the SAW device and the Fourier-Transform Infrared (FT-IR) spectro-microscopic data of the molecular imprinted polymer (MIP) recognition thin film which is deposited on the surface of the SAW device. With the use of the MIP thin films, the target recognition is functioned by identifying the geometry shape of the targets. We are able to provide a more accurate molecular selectivity and sensitivity than those current SAW chemical sensors which were based on regular chemical absorbed films. Spectrum results of MIP films will be presented herein.

並列關鍵字

Surface Acoustic Wave SAW ； Molecular Imprinted Polymer MIP ； Fourier-transform Infrared FT-IR

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