以分離元件製作的智慧型熱傳導真空計之研究

Thermal Conductivity Vacuum Gauge Constructed by Using Discrete Components

林寶德(Pao-Te Lin) ； 呂明峰(Ming-Feng Lu)

《明新學報》 38卷2期 (2012/08) Pp. 1-12

https://doi.org/10.29688/MHJ.201208.0001

摘要

本研究探討利用SMD（Surface Mounted Devices）包裝之分離元件電晶體來作為熱傳導真空計之發熱體與溫度感測電晶體的設計與研究，實現一種低成本、低耗能、智慧型真空感測真空計；使用雙感測環境溫度的方法，完整偵測熱傳導真空計週邊環境溫度變化並做補償，因此有效減少誤差；採用SMD包裝之孿生電晶體作為熱傳導真空計之發熱體與溫度感測電晶體，因此結構穩固、環境耐受性高，成本更低；使用16位元之單晶片微處理器做為控制與計算核心，藉由單晶片微處理器來調節（Conditioner）及優化（optimization）熱傳導真空計的類比信號，實現高精度、低耗能、低成本之設計。提供電路設計者以分離元件代替微機電（MEMS）元件，使用一般印刷電路板電路的製作程序，無須特殊半導體製程設備之低成本、環境耐受性高的熱傳導真空計。

關鍵字

派藍尼真空計 ； 熱傳導真空計 ； 熱傳導 ； 智慧型感測器

並列摘要

This study explored an intelligent vacuum gauge which has properties of low cost, high precision, and low power consumption. Because of the heating element and temperature sensor of the vacuum gauge are made by SMD (Surface Mounted Devices) twin transistors, the vacuum gauge includes advantages of low cost and higher environmental tolerance. The dual side environmental temperature sensing transistor is used to detect environmental temperature and compensate temperature variation. Therefore, the precision of the vacuum gauge is increased. The 16-bit single-chip microprocessor is used to be the core of controller, calculator, power management, analog sensing signal conditioner and optimization. Thus, the vacuum gauge with high precision and low power consumption can be fabricated.

並列關鍵字

Pirani gauge ； Thermal conductivity gauge ； Thermal conductivity ； Smart Sensor

參考文獻

Chan, Philip C.H.(2002).An integrated gas sensor technology using surface micro-machining.Sensors and Actuators.B82,277-283.

Chou, Bruce C. S.,Chen, Yeong-Maw(1996).A sensitive Pirani vacuum sensor and the electrothermal SPICE modeling.Sensors and Actuators.A53,273-277.

Kimura, M.,Toshima, K.(2003).Thermistor-like pn junction temperature-Sensor with variable sensitivity and its combination with a micro air-bridge heater.Sensors and Actuators.A108,239-243.

Kimura, Mitsuteru(2005).Proposal of a new structure thermal vacuum sensor with Diode-Thermistors combined with a micro Air-Bridge heater.THERMINIC.2005,117-121.

Klaassen, Erno H.(1997).Integrated thermal-conductivity vacuum sensor.Sensors and Actuators.A58,37-42.