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Design and Fabrication of Topologically Optimal Miniature Microgripper Integrated with an Electro-Thermal Microactuator

並列摘要


This paper presents a topological-optimization method which applies the theory of ground structure parameterization to design and analyzes a microgripper device. The study defines the compliant design domain as 2000μm×2000μm with a 200μm thickness, and discusses the effect of different optimization parameters. The driver is an electro-thermal microactuator that can actuate approximately 6000μN of output force to the displacement amplifier. Finally, the microgripper tip deflects up to 18μm when 1.5V is applied.

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