利用表面電漿波激發組態之金屬厚度變化對氟之共振角量測與分析

Using Surface Plasma Waves Excitation Configuration of Metal Thickness Change of Fluoride of Measurement and Analysis

李正民(Cheng-Min Lee) ； 鄭育錫(Yu-Si Jheng) ； 趙文鴻(Wen-Hong Chao) ； 陳冠宇(Guan-Yu Chen) ； 黃沛晴(Pei-Qing Huang) ； 劉民鈞(Min-Jen Liu)

《健行學報》 33卷1期 (2013/01) Pp. 1-13

摘要

本文使用BK7作為稜鏡，利用受挫式內部全反射法(Frustrated Total Internal Reflection；FTIR)搭配Otto組態來偵測氟於金屬中之最佳化共振角。利用表面電漿波光學檢測系統，量測相異介電常數之介質，使得表面電漿波光譜的共振角度和吸收深度會因為氟(Fluorine)的不同而做出靈敏與即時的反應，在研究中首先利用表面電漿波理論並配合三層反射率公式，進行電腦模擬。我們使用MATLAB程式軟體模擬激發表面電漿波實驗架構，來量測不同金屬厚度變化對氟之表面電漿波共振角。光源波長、金屬薄膜層厚度與Otto組態中三層介質的介電常數都會影響表面電漿波共振角與反射率強度的變化，本文以金屬薄膜層厚度為變因，於電腦中藉由改變金銀銅厚度進行模擬，找出激發表面電漿波之最佳化金屬薄膜層，並對氟之共振角影響以及差異性做分析與研究。本實驗以氟在銀薄膜65nm為最佳化表面電漿波的共振角度與吸收深度。由實驗結果可清楚看出在金屬銀所產生的表面電漿波曲線之半寬高最窄，反應時間較短，且解析度更高，也最為靈敏。

關鍵字

表面電漿波 ； Otto組態 ； 受挫式內部全反射 ； 介電常數 ； 氟

並列摘要

This article uses Bk7 action prism, frustrated total Internal reflection collocation Otto configuration to detect fluorine in metal in optimization resonance angle by using surface plasma waves optics detection system measurement of different dielectric constants of the dielectric The surface plasma wave spectra of the resonant angle and the absorption depth because fluorine is different and makes sensitive and immediate response in the first studied by surface plasmon wave theory and combined with three layers of reflectivity formula by computer simulation, We use MATLAB program software simulation of the excitation of surface plasma wave experimental architecture to measure the different metal thickness on the fluorine surface plasma wave resonance angle.The wavelength of light source, the thickness of metal film and the dielectric constants of three layers in Otto configuration affect the results of surface plasma wave resonance angles and the intensities of reflective light The study uses the film thicknesses to be the variable in computer change gold-silver-copper in simulation of the surface plasma resonance. We find out the best thickness of gold film in our study, and fluorine the resonance angle affect and differences for analysis and research.The liquid fluoride is in the silver film 65nm optimized surface plasma wave resonance angle and absorption depth. The experimental results can be seen in metal silver generated of the surface plasma wave curve of the high narrowest, shorter reaction time and higher resolution, but also the most sensitive.

並列關鍵字

surface plasma waves ； Otto configuration ； frustrated total internal ； permittivity ； fluorine