網版印刷厚膜及氣膠沉積堆疊多層壓電微型能量擷取裝置之研製

近年來由於物聯網的概念相當熱門，對於感知層中的傳感元件需求量大增，也因積體電路製程技術的發展，越來越多微型化智慧元件耗能需求逐漸降至數十微瓦，因此如何供應龐大數量的微能量需求就成相當重要的議題。傳統使用接線式供電或者電池式供電，因元件安裝位置隱蔽且有使用壽命問題，因此在供電上造成相當大的麻煩。而一種能夠透過環境能源轉換電能的自供電系統就有其優勢。一般多採用太陽能作為能量源擷取使用，但物聯網架構中大部分元件安裝於室內或機台內部環境，因缺乏穩定的太陽光能環境，作為供電使用上受到相當大的限制，而環境中能量密度次高的壓電式擷取震動能源取電方式就成了不錯的選擇之一。為了使製作出的壓電能量擷取裝置更適合供電給應用端做使用。因此本論文第三章朝如何使用網版印刷厚膜技術，再短時間內沉積所需之高品質壓電層膜厚。於第四章時主要朝壓電微型能量擷取裝置之結構改變，去改善能量擷取裝置之輸出弱點。實驗結果顯示，網版印刷之PZT壓電厚膜，經過高溫燒結的製程改善，有效避免材料中的鉛成分氧化揮發，在高溫燒結後能保有較理想之壓電材料特性。此外，使用氣膠沉積技術製作堆疊多層微型能量擷取器元件，以並聯式極化各層電偶極矩排列方向，並以並聯式連接各層量測輸出特性。當元件在1 g加速度及共振頻率121.5 Hz下，其最佳負載阻抗值約為15 kΩ，且在最佳阻抗下輸出功率為80.14 μW。相較於單層架構元件，其負載阻抗值下降約近十倍，及在最佳阻抗值時其輸出電流值增加約有三倍之多。

關鍵字

微機電；壓電材料；能量擷取；網版印刷；氣膠沉積

並列摘要

The concept of “Internet of Things” has become a hot topic in recent years, and the need for sensing devices has risen substantially. Due to the advancement of VLSI technology, the power consumption of micro-scale smart devices has gradually reduced to tens of microwatts. As such, the ability to produce this level of energy in large quantity has become an important task. Traditional use of power cord to supply energy or the usage of battery has proven to be quite inconvenient, for the placement of the devices may be hard to reach, and the lifetime of such power sources are often unreliable. A method that utilizes the environment to provide a self-powered electrical energy will be beneficial. Solar power can be used as a general resource, but in many cases the devices are installed in enclosed areas where lighting is insufficient. Therefore, vibrational energy sources has become a primary target for energy extraction. In order to create a piezoelectric energy harvester that is suitable to provide energy for further applications, a screen-printing technique to create thick film is discussed in chapter three of this paper. The technique is used to deposit high quality piezoelectric film in a short amount of time. In chapter four, the structure and design of the piezoelectric harvester is discussed, to improve the overall output of the harvester. Experimental results indicate that the PZT piezoelectric thick film has avoided the oxidation and vaporization of lead from the material when a sintering process has been done. The high temperature sintering process can preserve a better piezoelectric characteristic. Additionally, Aerosol deposition method is used to fabricate a multilayer micro energy harvester. By poling each layer’s dipole in parallel form, and connecting each layer in parallel to measure the performance, we can obtain the optimal load to be 15kΩ, and the optimal output power to be 80.14μW when the device is operating at its resonant frequency of 121.5Hz and under 1g acceleration. In comparison to a single-layer structured device, the output load resistance has been lowered to almost 10 times, and the output current at the optimal load has increase to about three times.

並列關鍵字

MEMS ； Piezoelectric material ； Energy harvesting ； Screen printing ； Aerosol deposition

參考文獻

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網版印刷厚膜及氣膠沉積堆疊多層壓電微型能量擷取裝置之研製

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