多晶矽奈米線生物分子感測元件之改善

The Device Design to Enhance the Performance of Poly-Si Nanowire Biosensor

吳至程(Chih-Cheng Wu)

指導教授 ： 林致廷

國立臺灣大學/電機資訊學院/生醫電子與資訊學研究所/碩士(2013年)

https://doi.org/10.6342/NTU.2013.10122

摘要

近年來，在生醫工程的領域，開始針對引起疾病的生物分子進行研究和檢測。並因應引發疾病的特定分子而做出不同的治療。然而，發展這些技術都必須要有快速、即時、準確，以及穩定的生物感測技術在背後作支援。隨著奈米科技的蓬勃發展，帶動了生物分子感測技術的進步，進而可以發展出更新穎的感測技術。多晶矽奈米線場效電晶體，近年來已被證實可以做出高靈敏度的生物分子感測器，可以針對不同的生物分子進行感測。
　　為了要驗證本論文欲達到的目的，感測元件皆經過實驗上的驗證。多晶矽奈米線場效電晶體先經過表面固定化過程來使元件具有對特定生物分子的接合能力，如此來進行不同濃度的心肌肌鈣蛋白(Cardiac Troponin I; cTnI)的測試。本論文利用螢光圖來確定生物分子修飾固定化的步驟是否確實並利用電場來增加感測的靈敏度。最後利用臨界電壓的改變來分析，多晶矽奈米線場效電晶體生物分子感測器的靈敏度可達到320fM。由元件的結果可知，本論文的實驗結果被證實了具有成為生物分子感測科技的潛力。

關鍵字

生物分子感測器 ； 奈米線 ； 電壓

並列摘要

The biomolecular marker approach has become an emerging diagnosis method in healthcare systems. In general, this approach utilizes the high-specific binding affinity in bio-conjugates to identify the target biomarkers. Traditionally, this approach is accomplished by labor-intensive laboratory and well-trained analysts. However, the demand of fast, real-time, and accurate diagnosis tool is increasing for the next generation healthcare system. To address this demand, with well-developed nano-technology, poly silicon nanowire field effect biosensor can be one of candidates for biomolecular sensors.
To demonstrate our approaches, the characteristics of fabricated poly-silicon nanowire devices are experimentally verified by using cardiac troponin I. To have the specific binding to cardiac troponin I, the fabricated poly-silicon nanowire is modified by biomolecular immobilized protocols. Both the fluorescent images and the experimental results show the effectiveness of this bio-immobilized step and biosensing capabilities. Furthermore, the sensitivity of the biosensor can be enhanced by applying the electric field. With this enhancement, the sensitivity of the poly-silicon nanowire biosensor can be examined as 320fM. In addition, the selectivity is also demonstrated to distinguish biomolecules with different charges. From these experimental results, our approaches are examined to be potential methods for biomarker detection technologies.

並列關鍵字

biosensor ； nanowire ； voltage

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