自動化3D氣流模擬應用於半導體廠潔淨室之研究

隨著半導體產業的演進，製程設備對環境的要求日益嚴苛，而環境控制則需透過潔淨室的運作，以排除包括溫度變化、微震動、噪音、微粒子污染等影響生產環境的因素，使晶圓良率保持在一定的水準，以便讓產品趕上快速變遷的市場，從中取得先機。而環境控制的方法有很大一部份需依靠空調系統，好的空調設計能讓溫度保持在一定的區間，且能提供足夠的換氣率，快速排出微粒子等污染因素，確保機台運作正常。然而現在的廠房多為顧及製程的良率，遂以過度的空調設計確保生產環境穩定，如此雖能達到環境控制的成效，但過度的設計卻造成能源浪費，同時也增加建造以及營運的成本，於是如何拿捏空調設備的配置便成為一門十分重要的學問。為具體評估空調設計的合理性，本研究提出BIM aided CFD (BaC)概念，應用建築資訊模型(Building Information Model, BIM)輔助近代計算流體力學(Computational Fluid Dynamics, CFD)分析，進行潔淨室3D流場模擬，直觀地呈現潔淨室內氣流運行的情況，作為空調設計的評估依據。但由於近代廠房規模龐大且複雜，進行CFD分析需要大量的人工參數輸入作業，以致於分析往往無法跟上設計變更，評估最新的設計結果。因此本研究進一步應用BaC技術，透過物件資訊交換機制，自動化輸入CFD參數，大量減少參數輸入所需的人力以及過程中的疏失，縮短模擬週期，使CFD分析能作為評估大型廠房潔淨室設計的依據。

關鍵字

BIM Aided CFD ；潔淨室；計算流體力學；建築資訊模型；空調設計

並列摘要

The variation of several environment factors directly affects the chemical reaction in the wafer and causes the reduction of manufacturing yields. Therefore, environment control becomes a critical issue in advanced nano-fab design. To deal with this issue, 3D BIM (Building Information Modeling) is incorporated into CFD (Computational Fluid Dynamics) simulation. The air flow or particles distribution in cleanroom are supplemented with 3D visualization that provides an intuitive platform for all of the design teams. Because of the complication of modern Giga-Fab, the pre-process of CFD simulation becomes very difficult. Therefore, the research focuses on its process automation. With the application of BaC (BIM aided CFD), not only the 3D geometry model but also its corresponding parameters can be concurrently imported into CFD. Thus, the procedure of reassigning CFD properties to every object is reduced. The new process of utilizing BaC beneficially simplifies the conventional CFD simulation.