靜電旋轉平台的理論計算、二維微機電電熱夾的量測、以及微線圈電磁鐵陣列捕捉系統的分析

Calculations of electrostatic comb-drive rotational platforms, measurements of an MEMS gripper with two DOFs, and analyses of a trapping system using an array of electromagnetic micro-coils

葉柏汎(Po-Fan Yeh)

指導教授 ： 蔡睿哲

國立臺灣大學/電機資訊學院/光電工程學研究所/碩士(2010年)

https://doi.org/10.6342/NTU.2010.10146

摘要

微機電系統已廣泛運用到各種不同科技領域，並且已成為生活中許多科技產品的重要技術，如噴墨印表機的噴頭、汽車的安全氣囊、遊戲機Wii的手搖桿、智慧型手機iPhone的感應元件、血壓計、微型投影機等等。利用微機電系統技術製作的元件包括: 加速計、微型陀螺儀、壓電元件、電熱致動器、微型旋轉平台、光學交換器、生化感測計等等。
在本論文中，首先會些介紹一個使用靜電梳狀電容致動原理設計的微型旋轉平台，分為「重疊」與「非重疊」的梳狀電容兩種元件，其中將著重在輸入電壓和對應轉動角度的理論計算。計算的結果顯示在輸入電壓105伏特之下，平台分別有±1.81°(重疊) 及±1.06°(非重疊)的轉動角度，並且前者元件(重疊)的實驗量測與計算結果符合(誤差約20%)。
接著會介紹一個使用電熱致動器原理製作、可二維運動(平面與出平面)的微機電電熱夾，介紹將會涉及設計原理、製程、模擬與實驗結果。出平面運動的模擬結果顯示12毫瓦的功率加於夾子懸臂上會有28微米的向下彎曲；實驗量測的結果顯示，夾子在2.7伏特下能張開138微米，從0~90伏特夾子前端的出平面運動結構則向下彎曲18微米。
最後會介紹一個可捕捉磁性粒子的微線圈電磁鐵陣列捕捉系統，設計原理及實驗方法將會被討論。磁性粒子滴於蓋玻片上並放置於陣列元件上方，利用兩組電流通於陣列可產生16個局部磁場點；每個微線圈上方有製作一個鎳塊，在50伏特下鎳塊表面能產生42高斯的磁場大小。

關鍵字

微機電系統 ； 靜電梳狀電容 ； 微型旋轉平台 ； 電熱致動器 ； 微機電電熱夾 ； 磁性粒子 ； 微線圈電磁鐵陣列

並列摘要

Microelectromechanical system (MEMS) is popularly used in some many application, it has become a significant technique among our technological necessities including inkjet printer, airbag deployment in modern cars, game controller of Nintendo Wii, sensor embedded in iPhone, blood pressure sensor and pico-projector, etc. Micro-devices fabricated by MEMS technology containing: accelerometer, gyroscope, piezoelectric actuator, electro-thermal actuator, rotational platform, optical switcher, biosensor and chemosensor, etc.
In this thesis, firstly an out-of-plane rotational platform using electrostatic combs will be introduced, especially the theoretical calculations with regard to applied voltage and rotational angles. The rotation angle is calculated to be ±1.81°, ±1.06° at 105V for the platforms with non-overlapping fingers and overlapping fingers, respectively. Also, the calculated result for the device with non-overlapping fingers agrees with experimental result, exhibiting ±2.3° at 105V (about 20% deviation).
Secondly a micro-gripper with two degrees of freedom (in-plane and out-of-plane motions) based on an electro-thermal actuator will be studied. Design, fabrications, simulation and experiment of the MEMS gripper will be involved. Simulation for out-of-plane motion shows the arm of the MEMS gripper bends downward about 28 μm with added power of 12mW；and experimental results indicate that the in-plane tip displacement of the gripper is 138 μm at 2.7 V whereas the tip’s out-of-plane swing is 18 μm as the applied voltage varies from 0 to 90 V and vice versa.
Finally, a trapping system using an array of electromagnetic micro-coils will be discussed, including design, calculation and experimental method. Magnetic particles are dripped upon microscopic glass which is placed on the array, and two electrical connections flow through the device can produce sixteen points of local magnetic fields. Besides, a small mass of nickel metal fabricated on the center of every micro-coil enhances the induced magnetic field which is calculated to be 42G at the surface of nickel metal.

並列關鍵字

Microelectromechanical system (MEMS) ； electrostatic combs ； out-of-plane rotational platform ； electro-thermal actuator ； MEMS gripper ； array of electromagnetic micro-coils ； magnetic particles

參考文獻

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