光波前多軸位移量測系統之設計與開發

Shack-Hartmann Wavefront Sensor for Multiaxial Actuation Measurement

張哲維(Che-Wei Chang)

指導教授 ： 黃光裕

國立臺灣大學/工學院/機械工程學研究所/碩士(2015年)

https://doi.org/10.6342/NTU.2015.00739

摘要

自從穿隧式電子顯微鏡發明後，人類進入了奈米的世界，進而影響到機械產業進入精密機械的時代，產生相對高解析度、高精確度及高穩定度檢測系統的需求，進而產生相關檢測設備的需求，一般最常使用之設備為干涉儀，其使用上許多限制，因此本論文的研究目的在於設計開發一套多軸致動量測系統，用於代替使用限制較多的干涉儀量測與監控精密致動器的多軸致動感測器。以反射式光路搭配光波前感測器(Shack-Hartmann Wavefront Sensor)偵測各種反射光波前。在致動器上架設反射平面，當致動器移動時，剛性板產生相對應之位移，此時反射平面的位置隨之改變，藉此觀測致動器的致動表現。量測系統開發借助光學模擬分析軟體，以確認量測可行性與性能，並針對準直透鏡選用作探討。根據初步分析
與實驗，致動器的傾斜量與位移量分別對應到 Zernike 多項式的傾斜模態與失焦模態。系統須選用適當之光波前類型，實驗測試不同光波前類型下，角度與線性位移量測有不同Zernike 係數變化之敏感度，實驗發現平面波前無法使用在線性位移量測，波前應用在角度量測和線性位移量測效果不同，曲率半徑較大適合用於角度量測，反之適合用於線性位移量測。開發的量測系統借助自動準直儀與雷射測距儀完成實驗驗證，並得到各自之校正曲線。多軸致動量測系統將實際運用量測精密致動器的多軸致動交叉耦合的行為。

關鍵字

波前感測器 ； Zernike 多項式 ； 致動行為 ； 多軸量測 ； 反射式量測

並列摘要

After STM was invented, phenomenon in nanometer dimension could be observed. In this thesis, we present a multiaxial actuation measurement system by using Shack-Hartmann wavefront sensor (SHWS). According to our preliminary analysis and experiment, it is found that the tilting and actuating motions of actuator have influences on Zernike tilting and defocusing modals. For developing the system, the optical engineering software is applied to prove its operational feasibility and to optimize its performance. Appropriate wavefront type is chosen to optimize the measurement ability. Wavefront without any optical path difference couldn’t be applied on linear displacement measurement. On the other hand, wavefront without defocus optical path difference with different diameter should trade off to apply on angular measurement. The system performance is also experimentally verified by using autocollimator and laser rangerfinger. Our multiaxial measurement system will be devoted to studying the cross coupling behavior of multiaxial actuation.

並列關鍵字

Shack-Hartmann Wavefront Sensor ； Zernike polynomials ； Actuation performance ； Multiaxial measurement ； Reflective measurement

參考文獻

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