具大量測範圍之水溶液環境力量量測系統之設計與開發

Design and Development of a Force Measurement System with a Large Measuring Range for Liquid Environment

買世昕(Shih-Hsin Mai)

指導教授 ： 廖先順

國立臺灣大學/工學院/機械工程學研究所/碩士(2020年)

https://doi.org/10.6342/NTU202001527

摘要

原子力顯微鏡是一款具有奈米等級解析度的掃描式探針顯微鏡。它不僅具備於水溶液環境中的量測能力，還能夠量測非導體材料，因此原子力顯微技術被廣泛應用於量測各種材料的表面特性。然而，隨著半導體科技的蓬勃發展以及海水淡化技術的進步，使得量測大尺寸材料上的微小區域表面電位需求提高。業界需要一款具備大量測範圍的表面特性量測系統，藉以突破目前商用原子力顯微僅能量測微米尺寸樣品的限制。本研究基於原子力顯微技術，開發出一套能夠量測水溶液環境中之大尺寸樣品的表面電性量測設備，論文內容包含：機構設計、光路設計、電路設計及控制程式。系統可量測公分等級之樣品，且其力量量測解析度可達到0.27 nN。利用此量測系統針對浸泡於去離子水中的雲母片表面電位進行量測，單點量測結果之平均值為-131.091 mV，而多點量測結果之平均值為-133.174 mV。自製系統所量測出來之數值與文獻中之雲母片表面電位量測結果-137 mV進行比較，其差異約為4至6 mV，可證明自製系統之量測正確性。

關鍵字

原子力顯微鏡 ； 水溶液環境 ； 大量測範圍 ； 電雙層 ； 表面電位

並列摘要

Atomic force microscope (AFM) is a type of scanning probe microscope (SPM), which is able to provide nanoscale image for both conducting and non-conducting materials. Therefore, AFM has been widely used to measure various surface properties on different kinds of materials. Currently, the scan size of common AFMs is in an range of 100 μm approximately. However, along with the vigorous development of semiconductor technology and seawater desalination technology, the need to measure zeta potential of a small area on a large sample keeps increasing in the industry. In this research, we developed a force measurement system which is capable of measuring zeta potential on a large-size sample in liquid environment. The mechanism design, optical design, circuit design and coding of the homemade system were described in this thesis. The system can measure samples with centimeter-level size, and its force measurement resolution can achieve 0.27 nN. In the experiment, the system was used to measure the zeta potential of the mica sample in deionized water. The results show that the average zeta potential of the mica sample was -131.091 mV by measuring a specific point 10 times, and the average zeta potential of the mica sample was -133.174 mV by measuring 8 different points on the surface. The zeta potential measured by our homemade system was 4 to 6 mV higher than the value of -137 mV in the literature, which proves the accuracy of the homemade system.

並列關鍵字

AFM ； Liquid environment ； Large measuring area ； Electric Double Layer ； Zeta potential

參考文獻

R. P. Feynman, "There's plenty of room at the bottom," California Institute of Technology, Engineering and Science magazine, 1960.

朱仁佑, 高豐生, 董睿軒, and 鄭淑蕙, "奈米纖維RO/NF膜的電性分析技術," 材料最前線, 2016.

G. Binnig, H. Rohrer, C. Gerber, and E. Weibel, "Surface studies by scanning tunneling microscopy," Physical review letters, vol. 49, no. 1, p. 57, 1982.

G. Binnig, C. F. Quate, and C. Gerber, "Atomic force microscope," Physical review letters, vol. 56, no. 9, p. 930, 1986.

O. Züger and D. Rugar, "First images from a magnetic resonance force microscope," Applied Physics Letters, vol. 63, no. 18, pp. 2496-2498, 1993.