應用表面電漿共振效應設計具特性光學行為之次波長結構光電元件

Design Subwavelength-Structured Optoelectronic Devices with Special Optical Behaviors by Utilizing Surface Plasmon Resonance

王文昀(Wen-Yun Wang)

指導教授 ： 陳學禮

國立臺灣大學/工學院/材料科學與工程學研究所/碩士(2007年)

https://doi.org/10.6342/NTU.2007.01071

摘要

由於表面電漿共振現象可以製作出具有可調變波段和高穿透率的導電薄膜，並可以應用在新穎的光電元件中，故近年來引起廣泛的討論。此篇論文利用金屬孔洞陣列激發表面電漿，並討論結構的週期、孔洞的大小、金屬膜的厚度，孔洞排列的形式對光學行為的影響。利用混成排列、分開混成排列、遠控式表面電漿，成功的設計了寬穿透帶與多穿透帶的光電元件。除了探討表面電漿引發的高穿透率，也研究了不同的孔洞排列形式或是不同的孔洞形狀所引發的偏光現象以及應用。在使用光譜儀去研究表面電漿現象之外，我們使用橢圓儀測量表面電漿並與光譜儀所量得的結果相印證，證明橢圓儀也可以量測異常穿透現象。
金屬孔洞陣列為二維的結構。利用在矽基板上箝入對準標記，我們成功的製作出具有準確的空間相對位置的三維的孔洞陣列。不同的層與層之間的對位置會造成截然不同的光學行為，而多層結構中的穿透率在某些特定的情況會和單層的結構一樣高。此現象可以應用在設計具多層結構的光電元件。
在本論文的最後則是表面電漿共振現象的一些應用：色彩濾鏡和感測器。色彩三元色：色調、亮度、彩度，可以分別地用金屬孔洞陣列的結構因子：週期、孔洞大小與形狀、金屬膜的厚度來控制。在先前的文獻中提出了利用表面電漿現象來感測表面材料的變化，然而藉由穿透波峰的變化量測表面材料只能得到定性的結果。應用伍茲異常現象，我們可以得到類似的結論，但是可以大大的提升此感測器的準確度。此靈敏的準確度不僅可以針對待測物品做定性的分析，亦可同時進行定量的分析。

關鍵字

表面電漿 ； 光電元件 ； 週期性金屬孔洞陣列 ； 次波長結構 ； 異常穿透現象

並列摘要

In recent years, surface plasmon resonance was widely studied and discussed since the unique optical property can be used for designing advanced optical devices, and transmission can be dramatically enhanced to several times when normalized by the hole area in structure with sub-wavelength hole arrays. Different period, hole size, hole shape, even holes arrangement in structures of periodic arrays are discussed in this thesis. Devices with multiple transmission bands are designed in three ways: intermixture, mixture, and remotely couple surface plasmons. The detail of each method is investigated, and not only the optical transmission but also the polarization-sensitive behaviors are discussed. Furthermore, a new method to measure surface plasmon resonance by utilizing ellipsometer is proved to be feasible.
In spite of the planar structure of hole arrays devices, we also fabricate the three-dimensional structure of hole arrays and gratings with good spatial alignment by inserting an align mark on the substrate. It is showed that in multiple-layers structure, the optical behavior is greatly influenced by the spatial relationship between each layer, and the transmission intensity is much higher in some special condition.
Surface plasmons-based applications, color filter and sensor, are introduced in the end of the thesis. By altering structure parameters of hole arrays, period, hole size and shape, thickness of metal film, we can control three main attributes of perceived color, Hue, lightness, and chroma respectively. In addition to sense the different material by transmission maximum in spectra, which can only do qualitative analysis, a much more accurate method, which can do both qualitative analysis and quantitative analysis by utilizing Wood’s anomaly, are proposed and examined in experiment and simulation.

並列關鍵字

surface plasmons ； optoelectronic devices ； metal hole arrays ； sub-wavelength structure ； extraordinary transmission

參考文獻

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