奈米結構的導引自組織成長模式
與一維奈米材料的物性研究

Abstract It is well known that the long-range ordered anodic alumina nanochannels array have extensive applications in the nanotechnology. These nanochannels are grown in acid electrolytes with hexagonally ordered porous structures and high aspect ratio. These unique structure features and its thermal and chemical stability make anodic alumina nanochannels ideal templates for the fabrication of ordered nanostructures. However, the self-organized anodic alumina nanochannels grown naturally can only be short-range order with a limited domain size of several micrometers in an applied anodization condition. To increase the ordered range of the nanochannels array, C. Y. Liu and co-workers demonstrated the ordered anodic alumina nanochannels on focused-ion-beam-prepatterned aluminum surfaces. The focused ion beam is used to create a hexagonally close-packed lattice of concaves on a electro-polished aluminum surface and these concaves will guide the growth of nanochannels in the following anodization step. By carefully adjusting the lattice constant in accordance with the anodization voltage, the growth of the nanochannels can be effectively guided and the ordered range is extended into 100 μm × 100 μm. In this work, we show a combined process of focused-ion-beam-guided technique and grazing Ar milling for fabrication of a long-range ordered nanoaperture array. Ar beam miller machine MPS-3000 PBN is set up to sputter the U-shaped barrier layer in order to create the nanoapertures. The incident Ar beam was tilted by an angle around 75 to well control the aperture size. The images of nanoapertures are taken by Transmission Electron Microscope (TEM). A nano-patterned aperture array was successfully fabricated with aperture nominal diameter of 12±2 nm and interpore spacing of 100±2 nm. The Fourier transform of the array reveals a hexagonal symmetry. The focused-ion-beam guided-grown process has increased the uniformity of both the interspacing and aperture size. By mounting nanoaperture array film on the silicon substrate, we can develop a new way to regular the long-range ordered nanostrucures on the silicon surface. The hexagonally close-packed lattice pattern of anodic alumina can be precisely transferred onto the silicon surface to form what we called the nanocell array. The structure of the nanocell array with certain uniformity is then defined by the self-organized mechanism and focused-ion-beam lithography. Inside the nanocell, the collection of the quantum dots reveals the specific nuclei of the cell. The specific nanostructure inside the nanocell is obtained by the appropriate selected parameters. This method can create some special nanostructures which are difficult to be fabricated by conventional lithography system and self-organization method. Finally, to demonstrate the importance of controllable ordered nanostructures, the luminescent properties of ZnO nanostructures prepared under different conditions were studied to investigate the influence of patterned catalysts on the following vapor-liquid-solid process. The UV peak measured in the PL spectrum indicates the better purity crystal quality with the assist of patterned Au catalysts. Except for the patterned catalysts, this technique can be further applied to explore the new fields in the future nanotechnologies.

並列關鍵字

anodic alumina ； nano ； lithography

參考文獻

44 Hideki Masuda, Akifumi Abe, Masashi Nakao, Atsushi Yokoo, Toshiaki Tamamura, and Kazuyuki Nishio, Adv. Mater. 2003, 15, 161

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1 “Nanotechnology”, Springer, edited by Gregory Timp

2 T. G. Tsai et al. Adv. Mater. 9, 1154 (1997)

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奈米結構的導引自組織成長模式與一維奈米材料的物性研究

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