雷射微細加工之研究

洪書彬(Shu-Bin Hong)

指導教授 ： 楊宏智

國立臺灣大學/工學院/機械工程學研究所/碩士(2006年)

https://doi.org/10.6342/NTU.2006.01664

摘要

二十一世紀初，高速、超精密與微細化已成為產業製造技術的必備要素，各種微結構與微元件紛紛被開發出來，半導體製程利用多次蝕刻和犧牲層的方式可以製造出二次元與三次元的元件，但是對於一些微小且特殊的結構，以現今的蝕刻技術往往需要多次重複曝光，因此相當耗費成本，也相對增加加工時間。
本論文以雷射微加工為主要研究標的，研究方向是在探討其工業應用性，並藉由誤差分析來取得較佳參數組合及建立相關圖表，為將來更複雜形狀的加工建立穩固的基礎。進行的步驟首先要加工出直徑範圍在10~30 μm區間的圓形凹洞，以及面積為100 μm X 100 μm的3D斜坡凹槽。前者著眼應用於LCD面板內部背光模組裡的導光板之製作，而後者則是要應用於凹版印刷的母版雕刻。
關鍵字：雷射加工、導光板、凹版印刷

關鍵字

雷射加工 ； 導光板 ； 凹版印刷

並列摘要

In the beginning of 21st century, various kinds of micro-structures and micro-components have been developed out one after another. By means of lithography, 2D and 3D micro-machining parts can be produced. However, for some small and special structures, it is still complex and time- consuming in fabrication.
Laser micro-machining and its applications are the main objectives of this thesis. By error analysis, the relationships between parameters and results of Laser machining are also established in this thesis. These revalant charts will set up the firm foundation for more complicated laser micro-machining process in the future. In this thesis, the first step is to machine a round hole (its diameter ranges from 10 μm to 30 μm), which applies to the manufacturing of light guide plate within LCD panel, and a sloped groove (its area is 100 μm X 100 μm), which applies to intaglio printing.
Keywords：Laser micro-machining、Light guide plate、Intaglio printing

並列關鍵字

Laser micro-machining ； Light guide plate ； Intaglio printing

參考文獻

［8］ 郭晉良, "準分子雷射加工微型3D立體結構", 成功大學機械工程學系碩士論文, 2002。

［23］ 葉易霖,"白光干涉垂直掃瞄之研究", 台灣大學機械工程學系碩士論文, 2004。

［3］ D. Hellrung, "High-accuracy micromachining of ceramics by frequency-tripled Nd:YAG-lasers", Proceedings of SPIE - The International Soiety for Optical Engineering, Vol.3618, pp. 348-356, 1999

［4］ L. Tunna, A. Kearns, W. O,Neill, C. J. Sutcliffe, "Micro- machining of copper using Nd:YAG laser radiation at 1064,532,and 355 nm wavelengths", Optics and Laser Technology 33, UK, p.135-143, 2000

［10］ D. K. Y. Low, L. Li, P. J. Byrd, "The effect of process parameters on spatter deposition in laser percussion drilling", Optics and Laser Technology 32, UK, p.347-354, 2000