高速共振式壓電片掃描平台之設計與開發

Design and Development of High-Speed Resonant Scanner with Piezo-electric Buzzer

鄭有博(Yuo-Po Cheng)

指導教授 ： 黃光裕

國立臺灣大學/工學院/機械工程學研究所/碩士(2015年)

https://doi.org/10.6342/NTU.2015.02402

摘要

隨著生物醫學、微機電製程、微型機械加工的技術發展，具備高解析且可快速測得樣品表面輪廓的量測技術已成為近年來的發展重點。定位系統與光學量測系統分別為表面輪廓量測技術的兩個主要核心，由定位系統將樣品移動到特定位置，再以光學量測系統測得樣品的形貌，並將測得的形貌與位置關係建構出完整的表面輪廓。
本論文以壓電蜂鳴片為核心，設計開發具回饋功能的共振式高速掃描平台，並利用像散式讀取頭可量測樣本表面高低起伏的功能作為光學量測系統，，以建構一套體積緊緻且具備高速掃描能力的表面輪廓量測系統。
共振式高速掃描平台採共平面式設計，將快慢雙軸的架構整合在一平面上，並利用蜂鳴片的黃銅基板作為致動時平行導引機制。除了應用逆壓電效應的致動功能外，還透過正壓電效應來量測平台位置。藉由壓電蜂鳴片的致動和量測功能的組合，可選擇大行程開迴路的方式或具備平台位置量測功能的閉迴路掃描模式。為達成高速掃圖的功能，快軸的設計上採用共振式原理以放大致動行程，以及提高掃描速度。掃描平台的動態性能亦透過理論和有限元素模擬分析達到最佳化設計。
本論文設計開發完成一組二維高速共振式掃描平台，其尺寸為長47 mm×寬33 mm×高20 mm，總重量為21.40 g。快軸與慢軸最大行程可達140 μm與5 μm，各軸全域非線性度分別為5.90%與3.07%，快軸空負載下共振頻率為675 Hz。並結合像散式藍光讀取頭完成開發表面輪廓量測系統，可成功掃描標準樣品TGZ3的台階，並以其比較開迴路控制與閉迴路控制掃描成果。

關鍵字

壓電蜂鳴片 ； 共平面架構 ； 共振式 ； 高速 ； 像散式讀取頭 ； 表面輪廓掃描 ； 壓電致動器 ； 壓電感測器

並列摘要

Along with the development of biomedical technology, MEMS processing, and micro-machining, the high resolution and dynamic measuring ability technology for sample profile measurement has become the receiving attention field in recent years. Profile measurement system consists of two major parts of the positioning unit and the optical measurement unit. The positioning unit is applied to localize the position in the plane. The optical measurement unit is employed to detect the height information of the sample surface. Therefore, the profile measurement system can build the sample surface profile by scanning a region of the sample.
This thesis demonstrates that the piezoelectric buzzer as the core component is utilized to design a high-speed resonant scanner. The astigmatic optical pick-up head measures the height of the sample surface. Integrating the high-speed resonant scanner and astigmatic optical pick-up head, the profile measurement system becomes compact and has a high-speed scanning capability.
High-speed resonant scanner constructs with a coplanar design, which integrates the fast-axis and slow-axis in the same plane with the brass board of the piezoelectric buzzer as a parallel guide mechanism. The fast-axis operated at its resonant frequency can increase the scanning speed and amplify the stroke. The piezoelectric buzzer applying inverse piezoelectric effect drives a large stroke in open-loop control. The closed-loop scan mode is another function if applying the direct piezoelectric effect on the buzzer. Besides, this thesis also demonstrates that the theory and finite element simulation are employed to enhance the dynamic performance of the scanner.
In the thesis, we develop a two-dimensional coplanar high-speed resonant scanner with buzzers. The dimensions of the scanner are 47 mm in length, 33 mm in wide, and 20 mm in height. The total weight of the scanner is 21.40 g. The scanner has maximum actuation strokes of 140 μm and 5 μm in the fast-axis and slow-axis, respectively. The non-linearity of the axes are 5.90% in fast-axis and 3.07% in slow-axis. Furthermore, the resonant frequency of the fast-axis without loading is up to 675 Hz. Combining the resonant scanner with astigmatism Blu-ray pick-up head, the profile measurement system can use both open-loop control and close-loop control to get the surface profile of the standard sample TGZ3 successfully.

並列關鍵字

Piezo buzzer ； Coplanar structure ； Resonance ； High-speed ； Astigmatic pick-up head ； Profile scanning ； Piezo actuator ； Piezo sensor

參考文獻

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