超音波馬達智慧型奈米定位控制系統之研究

Research and development of an intelligent nano-positioning control on ultrasonic motor system

賴子發(Zi-Fa Lai)

指導教授 ： 范光照

國立臺灣大學/工學院/機械工程學研究所/碩士(2005年)

https://doi.org/10.6342/NTU.2005.02329

摘要

本研究使用超音波馬達作為致動器，並加以發展能夠達到高精度位移回授的正交訊號解碼技術，以模糊小腦控制器為基礎，對於超音波馬達摩擦力變動的情形下進行智慧型的控制與估測，於DAQ裝置及C語言的架構上發展PC-Based的整合系統，達到奈米定位控制系統的建立。

近年來隨著微、奈米技術的蓬勃發展，在長行程精密定位設備的設計上，因壓電伸致驅動方式難以達到長行程的定位，大多採用長行程粗位移平台與短行程微定位平台組合而成的方式。而研究中所採用的超音波馬達，同時具有長行程的共振模態驅動及精密位移的彎曲模態驅動，可降低因組合長短行程平台所帶來的複雜性及誤差。

本研究首先深入探討超音波馬達的原理及模型，並對超音波馬達的各個驅動模式完成驅動測試及研究驅動現象。對於超音波馬達馬達的變摩擦力特性，使用模糊小腦控制器對各個驅動模式加以進行運動控制，使對於因摩擦力狀況改變使得同樣輸入而得到變異性極大的運動情形，得以達到適當反應、預估、及控制。

另一方面應用雷射繞射光柵干涉儀作為奈米級位移回授元件，並發展正交訊號處理及誤差消除方法。並於系統的概念上建置可各軸延伸使用的系統，以及應用DVD探頭於奈米定位系統延伸研究。

關鍵字

超音波馬達 ； 模糊小腦控制器 ； 雷射繞射光柵干涉儀 ； DVD量測探頭

並列摘要

The research proposed a positioning system with nano resolution. Utilize ultrasonic motor as the actuator, and develop orthogonal signal decoding method for LDGI (Laser Diffraction Grating Interferometer) as displacement feedback with high accuracy. Based on FCMAC (Fuzzy Cerebellar Model Articulation Controller) control algorithm for controlling and predicting the variation of ultrasonic motor friction driving, establishing PC-Based positioning integral system in with BCB (Borland C++ Builder) software and National Instrument DAQ (Data Acquisition) Device, to achieve the demand of intelligent nano positioning control.

In recent years, due to the developing of nano technologies, traditionally piezoelectric device is regarded as actuator in precision positional devices, and the stroke is limited. Therefore it’s generally combined with another long-stroke stage to accomplish high-resolution and long-stroke purpose. However, accompanied assembling and volumetric error will be generated, and the controlling system will become much complicated. In this research the selecting actuator is ultrasonic motor, with resonant state to drive in long-stroke and high-speed, and bending mode to provide acting as piezoelectric actuator to achieve high-resolution. Therefore the long-stroke and high-resolution demand of nano positioning system is achievable with ultrasonic motor.

In positioning system developing, introduce the principle of ultrasonic motor and simulating at first. For the several controlling modes to achieving long-stroke and high-resolution positioning, design experiments to observe and realize the phenomenon while driving. For the driving status of friction variation because of friction driving property, design FCMAC controlling algorithm for each modes respectively, to make each friction variation status could get a suitable response, prediction, and control.

For displacement feedback, utilize LDGI and developing method to eliminate error of orthogonal signal, and developed positioning system base on class concepts for extension requirements. Furthermore, DVD pick-up head and triggering device design are utilizing for measurement applications.

並列關鍵字

Ultrasonic motor ； FCMAC ； LDGI ； DVD pick-up head

參考文獻

【70】李昆勳, "DVD探頭自動聚焦位移回饋系統之研製", 國立台灣大學機械工程學研究所碩士論文, 2005.

【53】陳宏謀, "植基於小腦模型補償之狀態回授控制器設計", 國立台灣師範工業教育研究所碩士論文, 2002.

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