高科技產業合理用水回收率之探討

A Study on Rational Water Reuse Rate in High-tech Industry

夏羅振祥(Hsia Lo Chenhsiang)

指導教授 ： 張陸滿

國立臺灣大學/工學院/土木工程學研究所/碩士(2010年)

https://doi.org/10.6342/NTU.2010.03106

摘要

高科技產業為我國經濟發展之重要支柱，半導體產業因為在製程上需使用大量純水，所以對於水資源的依賴相當大。台灣因水資源不穩定，確保用水無虞、維持正常生產已儼然成為高科技產業重要挑戰，是故加強用水回收以減少業界對於水資源的依賴，自然成為高科技產業在台灣生存發展的重要課題。為促使高科技業界有效利用水資源，政府當局訂定有嚴格的用水回收率標準。本研究旨在探討合理用水回收率評估模式，並推估個案工廠的合理值。
總用水成本為取水成本、排水成本及廢水回收處理成本之和，而其中至少需有一項成本符合「成本遞增法則」（Law of Increasing Costs）才有合理用水回收率。本研究則以廢水回收處理時發生成本遞增為基準進行評估。當總成本對回收率之曲線呈一開口向上的U形曲線時，最低總成本所對應的回收率即為合理用水回收率。以某半導體廠為例，水價為12.9元/m3、排放成本單價為10元/m3時，合理的全廠用水回收率及製程用水回收率分別為56.5%及75.8%。本研究顯示水價提升將帶動合理用水回收率提升，以某廠為例，當合理全廠用水回收率訂為70%時，相對應的水價為15元/m3，而當合理全廠用水回收率訂為75%時，相對應的水價升為22元/m3。此結果顯示我國水價確實偏低，仍有成長空間。

關鍵字

高科技產業 ； 半導體產業 ； 製程用水 ； 用水回收率 ； 合理用水回收率

並列摘要

High-tech industries form an important pillar of economic development in Taiwan. The semiconductor industry considerably relies on water resource because a huge amount of pure water is needed during the manufacturing process. Due to unstable water resources in Taiwan , to ensure enough water to maintain normal production of high-tech industry has become a major challenge. To promote efficient use of water resources in high-tech industry, the Government has set strict standards for water reuse rate. This study shows the rational water reuse rate (RWRR) of assessment model and a reasonable estimate of the value of RWRR in a semiconductor factory. The total cost of water consists of tap water fee, drainage fee, cost of wastewater reclamation and reuse. One of these costs must at least obey the “Law of Increasing Costs”. In this study, the cost of wastewater reclamation and reuse obeys the law that is used as the base to assess the RWRR. When the curve of the total cost vs. the water reuse rate is an U-shaped form, a water reuse rate corresponding to the minimum total cost should be reasonable, and we call it the rational water reuse rate. For example, on a semiconductor manufacturing factory, the RWRR of whole plant is 56.5% and the RWRR of manufacturing process is 75.8% when the tap water unit price is NT$12.9 per cubic meter and drainage unit price is NT$10 per cubic meter. This study shows increasing tap water unit price will lead to the raise in RWRR. For example in a factory , when the RWRR of whole plant is set at 70% , the corresponding tap water unit price is NT$15 per cubc meter, but when the RWRR of whole plant is set at 75%, the corresponding tap water unit price will rise to NT$22 per cubc meter. The results show that the price of the current tap water is quite low for industries in Taiwan, and there is still much room for growth of tap water price raise.

並列關鍵字

High-Tech Industry ； Semiconductor Industry ； Manufacturing Process Water ； Water Reuse Rate ； Rational Water Reuse Rate

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