以壓印法及反應離子蝕刻製程製作玻璃繞射光學元件之研究

由於光電及光學工業的快速發展，使得光學元件及外形越來越需要達到高精度等級的要求。這些光學元件的外形從平面、球面發展至非球面及自由曲面，那些球面及軸對稱的光學元件已無法滿足學術及工業上應用之需求。繞射光學元件(DOEs)具有厚度薄、重量輕的優點符合了這些需求，它們現在已被廣泛的應用在光通信、光計算、光耦合、LED照明燈和太陽能收集模組上。然而，由於DOEs的形狀複雜，特別是以玻璃為材料的DOEs更是難以製作。本研究的目的是利用反應離子蝕刻製程製作玻璃DOEs。先使用SPDT刀具在金屬模具上製作出繞射結構，隨後將其壓印在玻璃平板表面所塗佈之聚合物上，而玻璃平板上之含有繞射圖案的聚合物經由RIE蝕刻後會將繞射圖案轉寫至玻璃表面上，目前採用三款不同的光學玻璃進行研究，經由研究後得到聚合物及玻璃的蝕刻率、形狀和表面粗糙度。結果顯示，雖然所得之表面粗糙度較差，但使用此製程可成功地將繞射結構轉移至光學玻璃上。

關鍵字

繞射光學元件；反應離子蝕刻系統；光學玻璃

並列摘要

Owing to the fast development in opto-electronic and optical industry, components of high precision and customized shapes are in great demand. The optical components have evolved from planar, spherical, aspheric to free-form geometries. As a result, spherical/axial symmetrical optical components can no longer fulfill the need of academic research and industrial application. The diffractive optical elements (DOEs), having the advantages of small in thickness and light in weight, are requested to meet the requirements. They are now widely used in optical communication, optical computing, optical coupling, LED lighting and solar energy collecting module. However, due to the complexity in shape, DOEs are very difficult to produce especially when they are made of glasses. This research aimed to fabricate glass DOEs by RIE process. A metal mold with diffractive structure was first generated by SPDT and was subsequently used as a stamp to duplicate diffractive patterns on the polymer layer coated on the glass plate. The patterned glass plate was then RIEed to transfer the diffractive patterns onto glass. Three different optical glasses were investigated in the present study. The etching rates of polymers/glasses and the shape/surface roughness of the obtained surface were systematically studied. The results showed that, though the surface finish was rather poor, diffractive structures could be successfully transferred to the optical glass by the proposed processes.

並列關鍵字

diffractive optical elements ； reactive ion etching ； optical glass

參考文獻

【23】林永凉、趙崇禮，“精密鑽石車削複合光學元件之研究,” 淡江大學機械與機電工程學系研究所碩士論文，2009。

【12】謝仲岳、趙崇禮，“光學玻璃表面處理及抗沾黏膜層設計對其界面化學反應影響之研究”，淡江大學機械與機電工程學系研究所碩士論文，2009。

【19】廖仁誠、趙崇禮，“以反應離子蝕刻製作鑽石微結構之研究,” 淡江大學機械與機電工程學系研究所碩士論文，2009。

【2】 C. M. Waits, A. Modafe and R. Ghodssi “Investigation of gray-scale technology for large area 3D silicon MEMS structures ,“J. Micromech. Microeng. 13 pp. 170–7 , 2003

【3】 B. Morgan, C. M. Waits, J. Krizmanic and R. Ghodssi “Development of a deep silicon phase Fresnel lens using gray-scale lithography and deep reactive ion etching,” J. Microelectromech. Syst. 13 pp. 113–20, 2004

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以壓印法及反應離子蝕刻製程製作玻璃繞射光學元件之研究

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