磊晶薄膜的成長

Epitaxial thin film growth

林明毅(Ming-Yi Lin)

指導教授 ： 林諭男

淡江大學/理學院/物理學系碩士班/碩士(2010年)

https://doi.org/10.6846/TKU.2010.00577

摘要

本論文研究以脈衝雷射鍍膜(Pulsed Laser Deposition, PLD)去成長磊晶薄膜，再利用X光繞射儀(X-ray diffractometer)跟原子力顯微鏡（Atomic force microscope, AFM）去探討材料的結晶相跟薄膜表面形貌。
先利用了多鐵材料BiMnO3成長去了解雷射鍍膜的過程跟探討影響薄膜成長的參數。再使用了脈衝雷射-分子束磊晶系統(Laser-MBE)，配合反射式高能電子繞射儀（Reflective high energy electron diffraction），去成長和控制La2/3Ca1/3MnO3之成長面，合成YBa2Cu3O7/La2/3Ca1/3MnO3的界面，包括(i) YBa2Cu3O7的”Cu-O面”接La2/3Ca1/3MnO3的”LaCa-O面”以及(ii) YBa2Cu3O7的”Ba-O面”跟La2/3Ca1/3MnO3的”Mn-O2面” 。

關鍵字

磊晶薄膜

並列摘要

In this study , we used pulsed laser deposition (PLD) technique to synthesize the epitaxial thin films , which were characterized using X-ray diffractometry (XRD) and Atomic force microscopy(AFM).
We first explored the effect of deposition parameters on the characteristics of Multiferroics , BiMnO3 so as to understand their correlation . We then used laser-MBE technique , in conjunction with the reflective high energy electron diffraction(RHEED) technique to synthesize YBa2Cu3O7 /La2/3Ca1/3MnO3 with specific interface.We successfully synthesized the YBCO/LCMO/SrTiO3 epitaxial thin films with two different kind of interfaces , viz (i) Cu-O(YBCO) interfaceing LaCo-O(LCMO) and (ii) Ba-O(YBCO) interfaceing Mn-O2(LCMO).

並列關鍵字

Epitaxial

參考文獻

[2]T. Atou, H. Chiba,1 K. Ohoyama, Y. Yamaguchi, and Y. Syono”Structure Determination of Ferromagnetic Perovskite BiMnO3” Journal of Solid State Chemistry 145, 639}642 (1999)

[3]Ram Seshadri＋ and Nicola A. Hill”Visualizing the Role of Bi 6s “Lone Pairs” in the Off-Center Distortion in Ferromagnetic

BiMnO3” Chem. Mater. 2001, 13, 2892-2899

” Manifestation of ferroelectromagnetism in multiferroic BiMnO3”

[6] W. Eerensteina, F. D. Morrison and J. F. Scott , N. D. Mathur,” Growth of highly resistive BiMnO3 films” APPLIED PHYSICS LETTERS 87, 101906 2005