The compressively stressed elastomer (PDMS film) with sputtered gold can be buckled and thus produced a ripple structure, in comparing the difference of toughness between PDMS film and gold. The instability of stress was observed on the interface between materials with different Young’s modules. During the process of forming the ripple structure, there will be the ripple dislocations, the cracks and the oriented surface cracks simultaneously appearing within the ripple structure. This study also purposed the formation mechanism of the ripple dislocation and explored annihilation methodologies of the ripple dislocation using various annealing treatment.