線性微波天線之設計及其電漿 電性研究

Design of Linear Microwave Antenna and its Plasma Electrical Characteristics

蕭明澤(Ming-Ze Shiao)

指導教授 ： 林諭男

淡江大學/理學院/物理學系碩士班/碩士(2009年)

https://doi.org/10.6846/TKU.2009.01029

摘要

薄膜太陽能電池鍍膜設備主要為PECVD (電漿輔助化學汽相沉積；Plasma Enhance Chemical Vapor Deposition)設備，微波線型PECVD適合用於大面積鍍膜，並具有電漿密度高，離子能量低的優點，但也伴隨發生駐波效應、導波阻抗匹配與矽汙染的問題，本研究目標是設計新的線型微波天線來解決上述困難。
線型微波天線透過高頻結構模擬器(High Frequency Structure Simulator ; HFSS)模擬電場分佈情形，發現改變腔體體積與位置能避免駐波效應發生；並利用Conformal Mapping (保角變換)得到不同開口線性天線之特性阻抗，配合Waveguide-to-Coaxial Design (導波管到同軸設計)再搭配Chebyshev做阻抗匹配；最後設計石英雙層管得知加上擋板後能避免矽汙染並由流體模擬軟體Fluent觀察其氣流分佈。
線性微波天線電漿源之設計完成後，經由實作製造，可產生線性電漿。
感謝國家高速網路與計算中心提供軟硬體資源，使本研究得以順利進行。

關鍵字

太陽電池 ； 微波電漿輔助化學沉積 ； 保角映射

並列摘要

The major equipment of thin film silicon cells is Plasma Enhance Chemical Vapor Deposition (PECVD). Microwave linear PECVD is used for large area deposition, and have advantages of high plasma density and low ion energy. But it follows some questions of standing wave effect, impedance matching and polluted silicon. The study is trying to design a new linear microwave antenna to solve these difficulties.
The filed distribution of linear microwave antenna simulated by High Frequency Structure Simulator (HFSS). The change of chamber volume and position can to avoid standing wave effect. Utilizing Conformal Mapping can get impedance of different angular slot linear antenna, then we can complete impedance matching by Waveguide-to-Coaxial Design and Chebyshev table. The last is to design a coaxial quartz tube, and add a partition to avoid polluted silicon, and getting gas distribution by Fluent.
After finishing linear microwave antenna design and making ,it can produce linear plasma.
We are grateful to the National Center for High-performance
Computing for computer time and facilities.

並列關鍵字

Solar Cells ； MPECVD ； Conformal Mapping

參考文獻

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