利用低溫冷卻基板製程研鍍銀奈米柱陣列

Fabrication of a silver nanorod array by cooling the substrate during deposition

阮晟軒(Xuan-Sheng Ruan)

指導教授 ： 任貽均

國立臺北科技大學/電資學院/光電工程系研究所/碩士(2014年)

摘要

本篇論文引入基板冷卻製程，使用液態氮冷卻基板至-145℃時利用斜向蒸鍍技術製鍍銀奈米斜柱陣列薄膜。蒸鍍速率分別用0.1 nm/s跟0.3 nm/s；當蒸鍍速率在0.1 nm/s時，製鍍出顆粒狀的結構，而蒸鍍速率在0.3 nm/s，可鍍製出銀奈米斜柱陣列。比較銀奈米斜柱陣列薄膜在基板有冷卻與無冷卻下的微觀結構；發現在低溫下可以有效的降低銀奈米斜柱陣列薄膜的等效直徑、銀奈米斜柱的填充率。低溫銀奈米斜柱陣列光學特性的部分，量測低溫銀奈米柱陣列之偏振相關光譜並嘗試由光譜得到等效光學常數。

關鍵字

銀 ； 奈米柱陣列 ； 低溫

並列摘要

This thesis leads the substrate cooling process. When using liquid nitrogen to cool the substrate to minus one hundred and forty five degree, we use the glancing angle deposition to fabricate the silver nanorod array, and the deposition rate we use are 0.1nm/s and 0.3nm/s. When the rate we use is 0.1nm/s, we can deposite granular structural. When the rate we use is 0.3nm/s, we can deposite silver nanorod array. By comparing the differences of the microscopic structure of the silver nanorod array between the substrate is cooled and uncooled. We can discover that the low temperature can decrease the equivalent diameter of silver nanorod array and the filling vactor of silver nanorod array. About the optical character of silver nanorod array, we can have the equivalent optical constant by measuring the polarization spectra of the silver nanorod array in the low temperature.

並列關鍵字

silver ； nanorod array ； low temperature

參考文獻

[1] H. A. Macleod, Thin-Film Optical Filters, 2nd ed. (Adam Hilger, 1986).

[2] K. Robbie, J. C. Sit, and M. J. Brett, "Advanced techniques for glancing angle

deposition," J. Vac. Sci. Technol. B 16, 1115-1122 (1998).

"Self-shadowing and surface diffusion effects in obliquely deposited thin films,"

Thin Solid Films 339, 88-94 (1999).