微奈米結構熱壓印環烯烴高分子成型研究

本研究利用熱壓印方法搭配厚膜環烯烴共聚合物(mCOC)基材，進行微米和奈米結構流動成型研究，實驗材料選擇以玻璃轉移溫度相近但流動性差異較大的2種熱塑性mCOC材料為基板，模仁選用直經200nm的奈米孔洞，微米結構為寬50um和高25um的三角形結構，不同的壓印溫度、壓印力量和壓印時間三個參數的變化，探討mCOC在微米和奈米結構中填充的型態，並由理論推導mCOC在奈米孔洞中成型的高度。研究結果顯示奈米結構部份，mCOC填充的流體行為在Tg+30℃流動性明顯的增加，mCOC-1 隨著壓印溫度的升高、壓印力量的不同填充的高度就有差異性，而mCOC-2的填充的高度會隨著溫度的升高，壓印力量的影響就會較小，利用毛細管理論推導出公式應用在本實驗的奈米壓印製程，推算出壓印時間為1分鐘的mCOC-1和mCOC-2的填充奈米孔洞之理論高度。微米結構部份，在Tg以上較不會受mCOC流動性影響，壓印溫度只需增加Tg+(15~20℃)且壓力不需很大就可以成型，壓印溫度會決定壓印力量與壓印時間。

關鍵字

奈米壓印；環狀烯烴聚合物；壓印溫度；微米結構

並列摘要

The research investigates the flow properties of cycloolefins copolymer(COC) substrate in the cavity with nano-and micro- structure by hot embossing imprint. There are two COC materials with similar glass transition temperatures (Tgs) and different melting mobility used in the research . The nano-cavity of a template with pillar pattern is 200nm diameter and the micro-cavity with prism pattern has a width of 50nm and a height of 25um .The filling heights and shapes are studied by different imprint conditions such as imprint temperature ,imprint force and imprint time. The theories of viscoelastic fluid are applied to study the filling height of polymer substrate in nano-and micro-cavity. The result of nano-cavity show that when the imprint temperature is 30℃ hiegher than Tg , the mobility of two mCOC resins increase substantially. The filling heights of mCOC-1 are different with different imprint temperatures and imprint forces. However, the filling heights of mCOC-2 are little influenced by the imprinting forces when the imprint temperatures are heigh. The capillary theory are derived for the filling heights of mCOC-1 and mCOC-2 at the imprinting time 1 minutes in nano cavity. The results of micro-structure indicate that when the imprint temperature are 15℃~20℃ higher than Tgs of mCOC resins , imprinting temperature is the key factor to determine the imprinting force and imprinting time.

並列關鍵字

nanoimprint ； mCOC ； Imprint temperature ； micro-s structure

參考文獻

[37] 張智桀，新型光學塑膠(COC)之不同為結構混摻後光學特性探討，國立清華大學化工系，2005年

[25] Yoshihiko Hirai, Satoshi Ysdhida, Nobuyuki Takagi, Yoshio Tanaka,

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[8] C. Clavijo Cedeno, et al, “Nanoimprint lithography for organic electronics,” Microelectronic Engineering, Vol.61–62,2002, pp.25-31,

國際替代計量

微奈米結構熱壓印環烯烴高分子成型研究

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