AISI P21模具鋼表面沉積CrNiN, CrWN及DLC薄膜之研究

A Study of CrNiN, CrWN and DLC Films Deposited on AISI P21 Mold Steel

顏名正(Ming-Cheng Yen)

指導教授 ： 韓麗龍 ； 施議訓

國立臺北科技大學/機電學院/機電整合研究所/碩士(2012年)

https://doi.org/10.6841/NTUT.2012.00224

摘要

AISI P21為常應用在塑膠模具鋼鏡面加工的材料，在本研究中，採用陰極電弧電漿蒸鍍法 (cathode arc plasma deposition, CAPD)對AISI P21模具鋼表面披覆CrNiN、CrWN及DLC三種不同製程的薄膜。製備後的薄膜試片分別作以下的分析：以原子力顯微鏡(AFM)分析薄膜表面形貌及表面粗糙度；以輝光放電分析儀(GDS)、掃描式電子顯微鏡(SEM)及能量散射光譜儀(EDS)分析薄膜厚度及成份；以X-射線繞射(XRD)分析薄膜結構；以奈米壓痕試驗來分析薄膜硬度及楊氏係數；以磨耗試驗機分析薄膜的耐磨耗特性及摩擦係數；利用洛氏硬度試驗機的C scale分析薄膜的附著性；以及藉由耐腐蝕試驗來分析薄膜抗腐蝕特性；最後以水接觸角試驗來分析薄膜之親、疏水性。
由實驗結果得知，AISI P21鍍層CrNiN、CrWN及DLC薄膜厚度分別約為1.3 μm、1.2 μm、1.3 μm。表面薄膜結構，CrNiN、CrWN薄膜主特徵峰都為(111)，繞射角(2θ)分別為與37.47°、38.21°。AISI P21基材之硬度值為HV 372.98與摩擦係數值為0.63；而CrNiN、CrWN及DLC三種薄膜之硬度值相當於HV 2480.6、HV 2434.7及HV 5238.73，其摩擦係數值為0.45、0.34及0.29。薄膜附著性方面，經壓痕測試得知CrNiN、CrWN及DLC三種薄膜分別具有HF3、HF2及HF5的等級；且磨耗率大小排列為 DLC

關鍵字

陰極電弧電漿沈積法 ； 耐磨耗性 ； 摩擦係數 ； 水接觸角 ； 腐蝕電流

並列摘要

AISI P21 is a commonly used material for the mirror surface of plastic molds. In this study, three different types of films, CrNiN, CrWN, and DLC films, were deposited on the AISI P21 by using Cathode Arc Plasma Deposition (CAPD) process. These specimens were analyzed by following methods: the surface morphology and roughness of the films were tested by AFM , the thickness and composition of the films were measured and analyzed by GDS, SEM, and EDS, the structure of the films were analyzed by XRD, the hardness and Young’s modulus of the films were analyzed by using Nano-indenter, the wear resistance and the coefficient of friction of the films were analyzed by using wear-test machine, the adhesion properties of the films were analyzed by using Rockwell C scale hardness tester, the corrosion resistance of the films were analyzed with corrosive tester, and the hydrophilic properties of the films were analyzed by using water contact angle tester.
According to the experimental results, the thicknesses of the three films are individually 1.3 μm, 1.2 μm and 1.3 μm. The main characteristic peak of CrNiN and CrWN films are both (111), and the diffraction angle (2θ) are 37.47°, 38.21°. The hardness of AISI P21 substrate is Hv 372.98 and the friction coefficient is 0.63. Besides, the hardness of CrNiN, CrWN, and DLC films are eguivalent HV 2480.6, HV 2434.7, and HV 5238.73 respectively, and the coefficients of friction are 0.45, 0.34, and 0.29. Through the rockwell indentation test, the quality of the adhesion of the three films are HF3, HF2 and HF5. And the wear rate analysis of the three films is DLC < CrWN < CrNiN, and the minimum wear rate of DLC is 0.62×10-6 mm3/N-m. The corrosive test shows that there is a lower corrosive current of the DLC film, 3.527 × 10-9 A, which means the best corrosion of the three films is DLC. Finally, by using water contact angle test analysis, the water contact angles of the three films, CrNiN, CrWN, and DLC, are individually 78.5°, 85.3°, and 70.2°. It indicates the maximum water contact angle of the three films is CrWN film and there is a better draft performance.
Through the above analytic results, ,it can obviously enhance the hardness; lower the coefficient of friction, and improve the surface wear resistance by using CAPD process deposited CrNiN, CrWN, and DLC films on the surface of AISI P21.

並列關鍵字

Cathodic Arc Plasma Deposition (CAPD) ； wear resistance ； coefficient of friction ； water contact angle ； corrosive current

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