本研究旨在針對一種新式的奈米微粒製備方法--真空潛弧製程(Submerged Arc Nanoparticle Synthesis System, SANSS),研究其最佳之製程參數,對該製程之製程參數,如電流、放電幅、電壓及介電液溫度進行分析,以深入瞭解影響奈米顆粒形貌之控制機制。為達成生產具理想特性之奈米顆粒及有效提昇奈米顆粒篩選之精確性與效率,針對所製備之奈米顆粒進行尺寸與真圓度等數據之精密量測與分析。在整體研究中,找出製程參數與奈米顆粒形貌數據的關係為首要目標。 針對製程參數之性質分析與控制,並以田口法(Taguchi’s method)進行實驗資料擷取與分析,以利製程系統之最佳化設計與控制之達成,促使奈米電弧製程之最佳化,生成具理想篩選與流體性質之奈米顆粒。用AFM掃描試片判斷試片上顆粒的分散性,同時對試片樣本以SEM、FE-SEM及TEM等顯微鏡儀器,拍攝顆粒影像,藉所得的顆粒影像進行影像處理與分析計算,得到所需的形貌尺寸資料,作為製程上修正的依據。 經實驗驗證,以田口法分析製程參數,配合FE-SEM及影像處理分析找出影響真圓度的機制,可有效進行顆粒真圓度的最佳化,生成理想篩選與流體性質之奈米顆粒。
The purpose of the thesis is to investigate the process behavior for determination of the optimized parameters the innovative nanoparticle preparing method, the Submerged Arc Nanoparticle Synthesis System (SANSS). The process and key parameters such as peak current, voltage, pulse duration, and temperature of the dielectric liquid, are investigated thoroughly in order to obtain nanoparticles with desired properties. As well as desired particle dimension properties for optimized particle sieving. This project plays an extremely crucial role to establish optimization of the nanoparticle manufacturing process. The desired uniformity of nanomaterials has been widely recognized as a crucial step towards successful development of nanomaterials for innovative product and processes. The research deploys Taguchi’s method for process characterization and optimization, as well as optimized particle sieving. Details of process evaluation and experimental results will be also conducted to evaluate the outcomes of this approach. Scan and try slice and judge that tries the dispersive of the particle on one with AFM, try one slice of samples with microscope instruments, such as SEM, FE-SEM and TEM. shoot the particle image , make use of the particle image of the income to carry on the image and deal with and analyze that calculates , get the necessary shape measurement materials, as making the basis revised on one. Prove by experiment law analyze make parameter with Taguchi’s mouth, it influences very round mechanism of degree to cooperate with FE-SEM and image to deal with and analyze finding out , can carry on very round optimization of degree of particle effectively , produce the ideal and screen it with the particle of fluid nature .