微細球狀探針之影像量測系統開發

The Development of Micro Spherical Stylus in Image Measurement System

鍾岱宇(Tai-Yu Chung)

指導教授 ： 許東亞 ； 吳明川

國立臺北科技大學/機電學院/機電整合研究所/碩士(2009年)

摘要

本論文主要是開發一套微細球狀探針(Micro Spherical Stylus)之影像量測系統並利用次像素(Sub-pixel)技術精密量測電極與球狀探針之偏心程度。本量測系統是使用高解析度CCD攝影機和精密XYZ三軸平台及一旋轉治具來取得微細球狀探針(Micro Spherical Stylus)之原始輪廓影像，再利用數位影像處理技術包括色彩轉換、低通濾波等方法和數值計算包括最小平方法及二次內插法，取得微細球狀探針(Micro Spherical Stylus)重要幾何參數，最後將影像做二值化、邊緣撿測等處理求得之邊點資料，利用AutoCad專業繪圖軟體建構出點資料輪廓。
此系統開發及實驗結果，有助於分析放電加工與探針之關係，並提供Micro-CMM(Coordinate Measure Machine)量測時之補償參數。

關鍵字

影像量測 ； 次像素 ； 微細球狀探針

並列摘要

This article mainly develop a set Micro Spherical Stylus of image measure system and using Sub-Pixel techniques measurement Micro Spherical Stylus of offset.
This measure system includes a high dpi CCD video camera, a precise XYZ stage, and a rotational fixture to obtain the original profile image of Micro Spherical Stylus.Then, it uses digital image processing which including Color Transform,Lowpass Filter,and value computing including Last-Square Method,Quadratic Interpolation Method to gain the important geometric parameters. Finally, do the image binarization, edge detection, such as the edge points to deal with information obtained by AutoCad professional software.
The development and experiment outcome of this measure system can give support to analyze the relationship between discharge machining and Stylus. and The provision of Micro-CMM (Coordinate Measure Machine) measurement of the compensation parameters.

並列關鍵字

Image measurement ； Sub-Pixel ； Micro Spherical Stylus

參考文獻

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