整合微流道晶片之CMOS-MEMS微粒計數器之研發

Development of counting device to combine micro-fluidic channel chip with CMOS-MEMS chip

張孟婷(Meng-Ting Chang)

指導教授 ： 黃榮堂

國立臺北科技大學/機電學院/機電整合研究所/碩士(2010年)

摘要

本研究主要是利用CMOS-MEMS製程技術與微機電製程技術製作微粒計數器。此研究主要分成三大部分製作，分別為(1)CMOS-MEMS計數晶片：經由台積電0.35μm 2P4M之製程方式代工製作，其上整合了計數結構以及放大電路，之後在針對計數結構利用感應藕合電漿離子蝕刻機(Inductive Coupled Plasma, ICP)自行進行後製程穿孔。(2)微流道晶片：以玻璃為基材，製作出與計數晶片配對之下電極與微流道。(3)計數晶片與微流道晶片整合：以無電鍍的方式於計數晶片上鍍出金屬凸塊做為訊號傳遞連接點，最後以二甲基矽氧烷(poly-dimethylsiloxane；PDMS)為密封蓋，將計數晶片與微流道晶片密封。
　　此計數裝置應用柯特爾原理為基礎，設計此計數晶片結構，當微粒通過計數晶片之結構孔洞時，使得結構孔洞內的穩定電流值產生變化，視微粒為一電阻，因此會造成計數孔洞的電流下降，而計算電流下降次數，即可獲得微粒數量。首先設計電極結構並利用模擬軟體CFD-RC模擬電極電場與粒子的運動，在依模擬的結果與應用之計數理論來設計製作計數裝置。本研究已成功的在CMOS-MEMS計數晶片上達成計算微粒之可行性，並且成功利用晶片上之放大電路量測出孔洞結構於液體中之訊號。

關鍵字

CMOS-MEMS ； 微機電製程 ； 微粒計數 ； 微流道封裝

並列摘要

This study mainly used CMOS-MEMS process technology and Micro-Electro-Mechanical Systems (MEMS) technology to produce particle counters. This study divided into three parts, namely (1) CMOS-MEMS counting chip: CMOS-MEMS counting chips were manufactured by TSMC 0.35 μm 2P4M processes, which integrated the counting structure with amplifying circuit. And the counting structure was made the counting hole by Inductive Coupled Plasma (ICP) in the post-process. (2) Micro-fluidic channel chip: Utilizing the glass as the substrate, and produced the under electrodes and Micro-fluidic channel which matched with the CMOS-MEMS counting chip. (3) CMOS-MEMS counting chip and Micro-fluidic channel chip combination: Utilizing electro-less plating method to make the metal bumps above the counting chip as the connection between CMOS-MEMS counting chip and Micro-fluidic channel chip, and finally using the poly-dimethylsiloxane (PDMS) to seal them.
Fundamentally, this counting device is based on coulter principle, when particles passed through the counting structure, the steady electric current will decreased. Counting the number of decreased current will get the number of particles. First, we designed the electrode structure, and used the simulation software called CFD-RC to simulate the electric field and the particles’ movement. According to the result of simulation and the principle of counting, we produced the counting device.
Successfully, this study has proven the feasibility of counting particles by using the CMOS-MEMS counting chip, and measured the current signal of structure by amplifying circuit in liquid.

並列關鍵字

CMOS-MEMS ； MEMS ； Biochip ； Particles counting ； micro-fluidic channel package

參考文獻

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