本研究主要是利用微機電製程技術和半導體製程技術製作微粒檢測的裝置晶片,此晶片大致分為三個部份:(1)微流道製作(2)集中電極的製作(3)細胞牽引與計數裝置。主要是利用介電力的作用使溶液中欲檢測的粒子能夠集中於計數裝置的作用範圍內,使得計數的正確性及準確性提高。再將微粒子牽引過離子通道,當微粒子經過離子通道時,會造成離子通道的電流下降,而後我們利用轉阻放大器把微小的電流差轉成電壓差,記錄此電壓下降的次數即可得知微粒子通過離子通道的數量。 為了證明此設計的可行性,所以利用模擬軟體(CFD-RC)模擬出電場的強度與方向,並可利用它來模擬生物微粒在一介質溶液中受到介電力的移動情況,再依據模擬的結果和理論設計製作。在晶片的實際製作上先在玻璃基材上製作微流道和集中電極,再結合透過晶片中心製作的離子通道和轉阻放大電路,完成微粒子計數晶片。 此新式設計,利用ISA (Industry Standard Architecture) 標準匯流排插槽將輸出訊號輸出到電極上,可以提高實驗的穩定性和方便性,並可重複的使用,同時可不需利用傳統的螢光染色來做為辨識,便能有效進行微粒子計數。
In this paper, we use CMOS technology and MEMS technology to produce particle counting chip witch includes trapping electrode、micro flue channel and ion pore . Let particles drop in chip inlet then use dielectrophoresis(DEP) force to concentrate and induce particles. When the particles pass through the micro-pore, the micro-pore’s current will reduce then use transimpedance amplifier to amplify small signal of nano ampere current. As a result, we can get the number of particles by recording the reduction events of the voltage. In order to provide practicability of device, we use CFD-RC, a simulation software, to simulate the strength and distribution of electro-field and follow the result of simulation to design chip . In experiment, we use MEMS process to fabricate the micro-electrode and flue channel on the glass substrate and use CMOS process to fabricate the transimpedance amplifier and ion pore. Then combine two fabrication to finish particle countering chip. We believe this new particle counting chip may be an alternative instead of employing traditional fluorescence labeling to identify particles’ number, and can correctly count the quantity of specific particles.