壓力感測器之液壓步階校正器研製

本論文旨在研製一液壓步階校正器並應用此校正器進行壓力感測器的動態校正。本研究採用滑軸閥機制，使此校正器可以產生一個具有快速響應的液壓步階波，以滿足現有動態壓力校正器所尚未達到的動態校正範圍。當壓力感測器進行動態壓力校正時，此液壓步階校正器的功能如同函數產生器用以激發待測壓力感測器的動態反應。本研究分為兩部分，首先為液壓步階校正器性能研究，其次為對三只不同的壓力感測器進行動態校正，而感測器的轉移函數是由實驗方式搭配系統鑑別法所求得。液壓步階校正器採用接觸密封，利用閥心與閥體的緊配合達到降低校正器內部的不必要的壓力洩漏。此外本研究採用雙自由度的動態模型描述與預測液壓步階校正器輸出的壓力響應。實驗結果證明此液壓步階校正器確實可以產生一個具有短暫上升時間的壓力步階波，待測壓力感測器的轉移函數在動態校正後求得，其動態特性以波德圖與單位步階響應表示。利用求得的反轉移函數可以進一步補償待測壓力感測器的量測訊號。

關鍵字

液壓步階校正器；壓力感測器；動態校正；轉移函數；滑軸閥機制；上升時間；壓力響應

並列摘要

A hydraulic step calibrator called HS calibrator was developed for the dynamic calibration of pressure sensors. Using the spool-valve mechanism, the HS calibrator was objective to generate hydraulic step waves with the quick transient response that existing hydraulic step calibrators can not achieved yet. Like conventional function generators, the HS calibrator was then employed to excite three pressure sensors. The transfer functions of the test pressure sensors were obtained experimentally via the identification with the autoregressive exogenous model (ARX). The contact-seal mechanism was applied to seal the HS calibrator realized by the interference fit between the movable spool and the stationary housing. Moreover, a two-degree-of-freedom model was firstly introduced to describe and predict the pressure transient of the hydraulic step waves generated by the HS calibrator. The experimental results demonstrate that the developed HS calibrator successfully yields the hydraulic step wave with the short rise time. The test pressure sensors were finally described by the Bode diagram and unit-step response based on the derived transfer functions.

並列關鍵字

Hydraulic step calibrator ； dynamic calibration ； pressure sensors ； spool- valve mechanism ； transfer functions ； pressure transient ； rise time

參考文獻

[29]Enso, I. and Kaddour, N., Advanced Process Identification and Control, Marcel Dekker, New York, 2002.

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國際替代計量

壓力感測器之液壓步階校正器研製

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