由於生產技術不斷的進步與發展,對於產品良率與精密度之要求亦日益提升,因此控制產品生產過程中的潔淨度是極為重要的課題,為使得產品能在良好的環境中生產、製造,便發展出對環境條件嚴格控管的無塵室,並根據生產方式、作業流程及產品要求的不同,訂定各類無塵室之相關規格。 近年來,台灣高科技產業蓬勃發展,就各類指標而言例如產值、出口值、雇用員工人數,乃至研究發展經費,占整體製造業的比重均大幅攀升,成為台灣經濟成長的主要動力,更成為台灣出口的主力產業。所以在能源短缺的台灣,高科技產業的能源使用管理,非常值得大家認識與關注。 本研究定義了半導體製造設備在無塵室內其設備、製程設施與設備相關項目能源消耗的計算方法
Because the production technology is developing continuously, the quality of production and precision is demanded rigor and rigor. Therefore, controlling the cleanliness is very important during the process of production. In order to make a better production environment, the cleanroom must be developed and set all kinds of standards to meet the required level of cleanroom for process and production requirement. Recently, the High-Tech industry is fast flourishing in Taiwan. The related indices such as value output, exports, employees and R&D expenses showed that the High-Tech industry has become the primary contributor of economic development. Therefore, energy consumption management in the High-Tech industry deserves more attention, especially for Taiwan which energy is shortage. The study define the method of calculating energies to be consumed by semiconductor manufacturing equipment as well as in a clean room when the semiconductor manufacturing equipment is used in order to grasp energy consumption of plant utilities for the equipment and items related to the equipment.