利用磁控濺鍍法製備透明抗菌銅釔氧化物薄膜及性質之研究

Preparation of transparent antibacterial Cu2Y2O5 thin film by RF sputtering

楊立暐(Li-Wei Yang)

指導教授 ： 邱德威

國立臺北科技大學/工程學院/材料及資源工程系研究所/碩士(2013年)

https://doi.org/10.6841/NTUT.2013.00712

摘要

赤銅鐵礦p型透明導電氧化物(TCO)如CuYO2、CuCrO2與CuAlO2逐漸受到學者研究興趣而使p型TCO發展逐年成熟。而延續本實驗室先前之抗菌薄膜研究，為了改善其透明度及符合歐盟ROHS環保規章，故本實驗以射頻磁控濺鍍法於玻璃基板上沉積銅釔氧化物薄膜，並探討不同熱處理氣氛及溫度條件對其性質之影響。熱處理後試片以X光繞射分析儀(X-ray Diffractometer, XRD)分析結構、以紫外可見光光譜儀(Ultraviolet-visible spectroscopy, UV-Vis)分析穿透率、以光譜式橢偏移(Spectroscopic ellipsometer)量測膜厚、以X射線光電子能譜儀(X-ray photoelectron spectroscopy,XPS)進一步確定薄膜元素價態。
本實驗首次將銅釔氧化物薄膜應用於透明抗菌塗層。根據ISO 22196規範進行銅釔氧薄膜之抗菌特性研究，結果顯示其光學穿透率可達80%以上，而薄膜厚度約為23.1nm，且其薄膜抗菌率可高於99%，故Cu2Y2O5薄膜可應用於觸碰面板等作為透明抗菌薄膜。

關鍵字

射頻磁控濺鍍法 ； 銅釔氧化物 ； 抗菌特性

並列摘要

Delafossite type of CuYO2, CuCrO2, and CuAlO2 are the potential candidates for p type transparent conducting oxide films (TCOs). Due to the wide range of applications for TCOs in electronic devices has generated interest in understanding the growth and characterization of these materials.
Continue our previous research of antibacterial thin films, in order to improve the transparency and fit the RoHs guide in this work employed a radio-frequency (RF) magnetron sputtering method to prepare Cu2Y2O5 thin film on quartz substrate and followed by post-deposition annealing at 800˚C in air. The structure of the Cu2Y2O5 thin films was confirmed by X-ray diffraction. The transmittance properties were measured by a UV-Vis spectrometer. The film thickness was measured by an ellipsometer.
The antibacterial property was followed the ISO 22196 method to evaluate the colony forming unit (CFU) of E. coli on the Cu2Y2O5 surface after several hours. The experimental results find the Cu2Y2O5 surface to exhibit superior antibacterial performance and an optical transparency of >80% in the visible region with a thickness of 23 nm. A novel transparent antibacterial coating has been demonstrated in the present study.

並列關鍵字

Delafossite ； RF sputtering ； Cu2Y2O5 ； antibacterial property

參考文獻

[43] 黃珧玲，黃嘉宏，曾堯宣，劉淑鈴，郭廷威 “健康綠建築的空氣污染商機光觸媒於室內空氣品質改善之應用”,中華水電冷凍空調月刊 1-6 (2008).

[17] 王永伯, “Preparation of Cu-based delafossite thin films and its antibacterial properties,” 國立台北科技大學, 2012 (指導教授:邱德威).

[2] 劉碩航，P型透明導電氧化物薄膜製備及其電性與光學特性之探討，碩士論文，台灣大學光電工程研究所，2007年 (指導教授：陳奕君)。

[42] L. Gupta, A. Mansingh and P.K.Srivastava, Thin Solid Films 176, 33-44 (1989).

[30] A. Sarkar, S. Ghosh, S. Chaudhuri and A. K. Pal, Thin Solid Films 204, 255-264 (1991).