單根多根多晶矽奈米線於NaCl濃度感測之研究

Study of the properties of NaCl concentration Sensor with single of plurality Poly-Si Nanowire

何耀元(Yao-Yuan HO)

指導教授 ： 許正治

元智大學/電機通訊學院/光電工程學系/碩士(2013年)

https://doi.org/10.6838/YZU.2013.00143

摘要

本論文利用top-down製程，製作多晶矽奈米線感測元件。本文探討在無摻雜奈米線進行在不同尺寸的變化、不同pH值之NaCl濃度量測，並並利用電腦撰寫LabVIEW即時量測程式，完成可攜式即時量測系統。由實驗結果顯示，當結構為每根奈米線寬度在0.3 m、長度為3 m，且並連5根奈米線時為最佳元件結構。在量測NaCl濃度範圍為1#westeur024#10-1 M至1#westeur024#10-6 M時，此感測元件最小量測濃度可達0.05845 ppm。此外，奈米線感測器具有良好的重複性、再現性及高靈敏度。因此，本研究之感測器可應用於生物感測器，進行化檢測之研究。

關鍵字

奈米線

並列摘要

In this study, we have fabricated polycrystalline silicon nanowire with the top-down method. To demonstrate the performance of this sensor, different concentration of sodium chloride were prepared in different pH values and measured by the proposed sensor of different geometrical size of the polycrystalline silicon nanowire. In addition, we have developed a real-time data gathered program with LabVIEW software. According to the results, the critical parameters of the geometrical size of the nanowire of the sensor can be obtained which were the width of 0.3 μm, the length of 3 μm, and parallel connection of five nanowires. The concentration of the sodium chloride can be measured within the range from 10-1 M to 10-6 M. The smallest concentration of the sodium chloride is about 0.05845 ppm. Furthermore, the sensor can be reused more than 60 times while preserve acceptable performance. Based on these results, we believe that the propsed sensors have good reproducibility, good reliability, and high sensitivity.

並列關鍵字

Nanowire

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